Abstract: A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.

Abstract: A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.

Abstract: A method and apparatus for the treatment of a waste gas containing dust and chemical contaminants are disclosed. The apparatus includes a combination of a cooling/dust-eliminating chamber and a chemical treatment chamber in a single container. The first mentioned chamber is provided with sprayers for the cooling liquid, a perpendicular bulkhead or pipes, a collecting plate for the cooling liquid and gas-dispersing pipes in a special configuration, so that the dust-liquid separation can be efficiently effected without badly affecting the chemical treatment of the gas. Thus, the apparatus can be minimized in size as a whole and made economically attractive.

Abstract: A method and apparatus for the treatment of a waste gas containing dust and chemical contaminants are disclosed. The apparatus includes a combination of a cooling/dust-eliminating chamber and a chemical treatment chamber in a single container. The first mentioned chamber is provided with sprayers for the cooling liquid, a perpendicular bulkhead or pipes, a collecting plate for the cooling liquid and gas-dispersing pipes in a special configuration, so that the dust-liquid separation can be efficiently effected without badly affecting the chemical treatment of the gas. Thus, the apparatus can be minimized in size as a whole and made economically attractive.

Abstract: In a method for manufacturing a liquid crystal display device, address and data lines are provided over a substrate, and a short-circuit area and an area to be made short-circuit are provided to cause short-circuiting between the address and data lines. It is prevented a TFT array from dielectric breakdown by static electricity in manufacturing processes, and examination is made for a connection breakage, and short-circuiting, at a TFT array for the liquid crystal display device, prior to the manufacturing step by cutting the short-circuit. Moreover, it can be presented from dielectric breakdown by static electricity in later processes to short the area to be made short-circuit after the examination. It is possible to both decrease a faults percentage of liquid crystal devices and improve their productivity.

Abstract: A process for treating a flue gas containing sulfur dioxide and fly ash is disclosed in which an aqueous absorbent liquid is sprayed into the glue gas stream, and the resulting gas is fed to a vertical, open-ended pipe to form a jet annular stream, so that portions of the SO.sub.2 and the fly ash contained in the flue gas are transferred to the liquid phase. The jet annular stream is then sparged into the aqueous absorbent held in a well-mixed vessel to form a jet bubbling layer in a shallow, upper region of the aqueous absorbent, so that a greater part of the SO.sub.2 and the fly ash are removed from the gas. Air is introduced into a deep lower region of said aqueous absorbent to provide streams of fine oxygen-containing gas bubbles throughout the whole vessel, so that the absorbed SO.sub.2 and other sulfites are oxidized to form coarse gypsum crystals while COD of the absorbent is reduced.

Abstract: A method of manufacturing a "two-level" solid-state image pickup device wherein a portion of a first metallic electrode electrically connected to a signal storage region is made to project to the highest position above a substrate on which it is formed. A coating of an organic insulating film is then applied to produce a flat surface. The entire surface of the organic film is then etched to expose the projections of the first metallic electrode. A second metallic electrode constituting a pixel electrode is connected to the first electrode at the exposed portion thereof.

Abstract: A reflective type liquid crystal display device and a method of manufacturing the same. The liquid crystal display device comprises a transparent first substrate, a second substrate, a reflective metal film and liquid crystal filled in a gap between the first substrate and the reflective metal film. The reflective metal film is formed on a polymer resin layer which is coated on the second substrate. The polymer resin layer has in one surface small protrusions or depressions having a gently curved profile. The reflective metal film formed on the surface of the polymer resin layer and has small protrusions or depressions having a gently curved profile. The liquid crystal display device can thus display a bright picture with high contrast.