Abstract: An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.

Abstract: An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.

Abstract: A vehicle heating apparatus is a heating apparatus to be mounted on or built in a vehicle seat at a position below a sitting portion of the vehicle seat. The vehicle heating apparatus includes: a housing having an intake port, a blowing port, and an internal space serving as a flow path of air from the intake port to the blowing port; a fan provided in the internal space of the housing; and a heater provided in the internal space of the housing. In a usage state where the vehicle heating apparatus is mounted on or built in the vehicle seat, the blowing port is located above the intake port and opens downwardly with respect to a horizontal direction. Thereby, the amount of heating required for the heater is further reduced.

Abstract: A vehicle heating apparatus (10a) to be mounted on or built in a vehicle seat (2) at a location below a sitting portion S of the vehicle seat (2) includes a housing (20), a fan (14), and a heater (15). The housing (20) has an intake port (11), a left nozzle (12l), a right nozzle (12r), an air curtain nozzle (12c), and an internal space (13) serving as air flow paths from the intake port (11) to the left nozzle (12l), to the right nozzle (12r), and to the air curtain nozzle (12c). The air curtain nozzle (12c) is located between the left nozzle (12l) and the right nozzle (12r), and is formed so as to, in the usage state, blow air delivered by the fan (14) in a direction inclined upward at an angle of not more than 90° to a direction in which warm wind is blown out of the left nozzle (12l) and the right nozzle (12r).

Abstract: Disclosure relates to a fixed abrasive-grain processing device and a method of fixed abrasive-grain processing used for producing a semiconductor wafer, and a method for producing a semiconductor wafer which make the surface of the semiconductor wafer possible to have preferable flatness and which can prevent the number of steps and the installation area of facilities from increasing.

Abstract: A vehicle heating apparatus (100A) of the present disclosure is a heating apparatus to be mounted on a vehicle seat (11) at a position below a sitting portion (5) of the vehicle seat (11). The vehicle heating apparatus (100A) includes: a housing (10) having an intake port (2), a blowing port (3), and an internal space (4) serving as a flow path of air from the intake port (2) to the blowing port (3); a fan (6) provided in the internal space (4); a heater (7) provided in the internal space (4); and a mounting structure (8) adapted to mount the housing (10) to the vehicle seat (11) in such a manner that the housing (10) is movable in a width direction of the vehicle seat (11). Therefore, the vehicle heating apparatus (100A) of the present disclosure is highly convenient for occupants.

Abstract: An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.

Abstract: A vehicle heating apparatus (100A) of the present disclosure is a heating apparatus to be mounted on a vehicle seat (11) at a position below a sitting portion (S) of the vehicle seat (11). The vehicle heating apparatus (100A) includes: a housing (10) having an intake port (2), a blowing port (3), and an internal space (4) serving as a flow path of air from the intake port (2) to the blowing port (3); a fan (6) provided in the internal space (4); a heater (7) provided in the internal space (4); and a mounting structure (8) adapted to mount the housing (10) to the vehicle seat (11) in such a manner that the housing (10) is movable in a width direction of the vehicle seat (11). Therefore, the vehicle heating apparatus (100A) of the present disclosure is highly convenient for occupants.

Abstract: An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

Abstract: A vehicle heating system in the present disclosure includes a seat heater provided in a vehicle seat, and a warm air heater that includes a housing including an intake port and a blowing port, a fan and a heater provided in an internal space of the housing, the internal space serving as a flow path of air extending from the intake port to the blowing port, and the warm air heater blowing warm air generated by the fan and the heater to lower legs of an occupant seated on the vehicle seat through the blowing port. The seat heater, the fan, and the heater operate to make temperature at the blowing port higher than temperature of a portion of a surface of the vehicle seat that faces the seat heater or temperature near the portion.

Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.

Abstract: A vehicle heating apparatus is a heating apparatus to be mounted on or built in a vehicle seat at a position below a sitting portion of the vehicle seat. The vehicle heating apparatus includes: a housing having an intake port, a blowing port, and an internal space serving as a flow path of air from the intake port to the blowing port; a fan provided in the internal space of the housing; and a heater provided in the internal space of the housing. In a usage state where the vehicle heating apparatus is mounted on or built in the vehicle seat, the blowing port is located above the intake port and opens downwardly with respect to a horizontal direction. Thereby, the amount of heating required for the heater is further reduced.

Abstract: A vehicle heating apparatus (10a) to be mounted on or built in a vehicle seat (2) at a location below a sitting portion S of the vehicle seat (2) includes a housing (20), a fan (14), and a heater (15). The housing (20) has an intake port (11), a left nozzle (12l), a right nozzle (12r), an air curtain nozzle (12c), and an internal space (13) serving as air flow paths from the intake port (11) to the left nozzle (12l), to the right nozzle (12r), and to the air curtain nozzle (12c). The air curtain nozzle (12c) is located between the left nozzle (12l) and the right nozzle (12r), and is formed so as to, in the usage state, blow air delivered by the fan (14) in a direction inclined upward at an angle of not more than 90° to a direction in which warm wind is blown out of the left nozzle (12l) and the right nozzle (12r).

Abstract: A heat storage device (1) of the present disclosure includes: a heat storage container (10) having an inlet (2) and an outlet (3) for a heat medium; a plate-like heat storage body (4) disposed in the heat storage container (10) and having a heat storage material (4a) and an envelope (4b) containing the heat storage material (4a); a plate-like spacer (6) placed on the heat storage body (4) in the heat storage container (10) and having a plurality of contact portions (6a) that are in contact with the heat storage body (4) and a plurality of non-contact portions (6b) that are spaced from the heat storage body (4), the contact portions (6a) and the non-contact portions (6b) being alternately formed in a specific direction; and a plurality of flow paths (5) for leading the heat medium from the inlet (2) to the outlet (3), the flow paths being formed by a surface of the heat storage body (4) and the non-contact portions (6b) and extending in a direction intersecting the specific direction.

Abstract: The present invention provides a polishing solution distribution apparatus capable of reducing distribution deviation of polishing solution even when leveling for installation is insufficient or inclination of an installation location varies and a polishing apparatus having the same. The polishing solution distribution apparatus includes a cone-shaped branch body in which a solution pan to store supplied polishing solution is formed and in which plural flow passages radially connected to a side face of the solution pan respectively and having a delivery port to supply polishing solution to a position lower than the connected position are formed, a support portion to support the branch body, and a universal joint mechanism to support the branch body via the support portion at a position being higher than the gravity center of the branch body.

Abstract: A vehicle heating apparatus (100A) of the present disclosure is a heating apparatus to be mounted on a vehicle seat (11) at a position below a sitting portion (S) of the vehicle seat (11). The vehicle heating apparatus (100A) includes: a housing (10) having an intake port (2), a blowing port (3), and an internal space (4) serving as a flow path of air from the intake port (2) to the blowing port (3); a fan (6) provided in the internal space (4); a heater (7) provided in the internal space (4); and a mounting structure (8) adapted to mount the housing (10) to the vehicle seat (11) in such a manner that the housing (10) is movable in a width direction of the vehicle seat (11). Therefore, the vehicle heating apparatus (100A) of the present disclosure is highly convenient for occupants.

Abstract: All treatments performed in machining processes other than a polishing process are performed while pure water free from free abrasive grains is supplied. Thus, an amount of abrasive grains included in a used processing liquid discharged in each process is reduced and semiconductor scraps are collected from the used slurry for recycling.

Abstract: The present invention provides a projector apparatus capable of ensuring stable operation, which is configured to efficiently cool an optical device by circulating air cooled by a cooling part of a refrigeration unit, and further to prevent moisture resulting from evaporation of dew adhered to the cooling part from adversely affecting the optical device when stopping the operation of the refrigeration unit. The optical chamber and the cooling chamber are enclosed respectively by adiabatic walls, the cooling chamber and the optical chamber are connected to each other through a cold air inlet port and a cold air outlet port, and the cold air inlet port and the cold air outlet port are provided with opening and closing mechanisms.

Abstract: In order to manufacture an epitaxial wafer having satisfactory flatness over its entire surface, epitaxial layers are experimentally grown upon actual wafer samples under various different layer formation conditions, the thickness profiles are measured over the entire surfaces of these wafers before and after growth of the layers, and, from the differences thereof, layer thickness profiles over the entire areas of the epitaxial layers under the various different layer formation conditions are ascertained and stored. Thereafter, the thickness profile of a substrate wafer is measured over its entire area, this is added to each of the layer thickness profiles under the various different layer formation conditions which have been stored, and the planarities of the manufactured wafers which would be manufactured under these various different layer formation conditions are predicted.