Patents by Inventor Yoshiaki Masu

Yoshiaki Masu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber apparatus and heating method
    Patent number: 9236283
    Abstract: A chamber apparatus including a chamber which accommodates a substrate having a coating film formed thereon; a first heating part which is accommodated in the chamber and disposed on a first face side of the substrate; a second heating part which is accommodated in the chamber and disposed on a second face side of the substrate opposite to the first face; and a pressure control part which is capable of pressurizing and depressurizing inside of the chamber in a heated state.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: January 12, 2016
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Tsutomu Sahoda, Yoshiaki Masu, Takashi Maruyama
  • CHAMBER APPARATUS AND HEATING METHOD
    Publication number: 20150060434
    Abstract: Provided is a chamber apparatus which includes a chamber, in a part of which an internal space capable of accommodating a substrate therein is formed, a heating portion which heats the substrate disposed in the internal space, and a temperature adjustment portion which adjusts the temperature of a part of the chamber, which is in contact with the internal space.
    Type: Application
    Filed: August 1, 2014
    Publication date: March 5, 2015
    Inventors: Tsutomu Sahoda, Yoshiaki Masu, Hidenori Miyamoto, Yubun Kikuchi
  • HEATING APPARATUS AND HEATING METHOD
    Publication number: 20140370451
    Abstract: A heating apparatus including: a heating part which heats a substrate having coated thereon a liquid material containing a metal and a solvent, and a thermocouple which is disposed to contact a portion of the heating part and has at least a surface of a contact portion contacting the heating part covered with a protection film.
    Type: Application
    Filed: June 18, 2013
    Publication date: December 18, 2014
    Inventors: Tsutomu Sahoda, Yoshiaki Masu, Hidenori Miyamoto, Yubun Kikuchi
  • SUBSTRATE TREATING APPARATUS AND METHOD OF TREATING SUBSTRATE
    Publication number: 20140363903
    Abstract: A substrate treating apparatus including: a chamber capable of accommodating a substrate; a treating part which conducts a predetermined treatment associated with forming a coating film containing a metal to the substrate accommodated in the chamber; and a detection part which detects a concentration of a predetermined gas containing a chalcogen element within a gas inside the chamber.
    Type: Application
    Filed: June 10, 2013
    Publication date: December 11, 2014
    Applicant: Tokyo Ohta Kogyo Co., Ltd.
    Inventors: Hidenori Miyamoto, Yubun Kikuchi, Tsutomu Sahoda, Yoshiaki Masu
  • CHAMBER APPARATUS AND HEATING METHOD
    Publication number: 20140263273
    Abstract: A chamber apparatus including a chamber which accommodates a substrate having a coating film formed thereon; a first heating part which is accommodated in the chamber and disposed on a first face side of the substrate; a second heating part which is accommodated in the chamber and disposed on a second face side of the substrate opposite to the first face; and a pressure control part which is capable of pressurizing and depressurizing inside of the chamber in a heated state.
    Type: Application
    Filed: March 12, 2013
    Publication date: September 18, 2014
    Applicant: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Tsutomu Sahoda, Yoshiaki Masu, Takashi Maruyama