Patents by Inventor Yoshiaki Satou

Yoshiaki Satou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing method and apparatus
    Patent number: 5961850
    Abstract: A plasma processing apparatus and method controls the temperature of those portions in the processing chamber to which reaction products or gaseous reaction products generated during plasma processing adhere, thereby minimizing the generation of foreign matter and ensuring high yields. A plasma processing gas is supplied to the plasma generation chamber 10 whose pressure is maintained at a predetermined value. Provided in the plasma generation chamber are a specimen mount 11 on which to mount an object to be processed and an evacuation mechanism 16 that evacuates the plasma generation chamber.
    Type: Grant
    Filed: March 14, 1996
    Date of Patent: October 5, 1999
    Assignee: Hitachi, Ltd.
    Inventors: Yoshiaki Satou, Tadamitsu Kanekiyo, katsuyoshi Kudo