Abstract: A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.

Abstract: A visual inspection apparatus of the present invention comprising illuminating units such as a wide range illuminating unit irradiating light on a wafer, a slit illuminating unit, and a spot illuminating unit, a swinging mechanism that movably swings and retains a wafer, and a control unit that controls these illuminating units and the swinging mechanism. This visual inspection apparatus wherein inspection condition setting values are input by a keyboard, mouse and so on, summarized by inspection process and stored in a storage unit as setting information for inspection processes, which are selected and inspected by a setting information selection unit in the control unit.

Abstract: A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.