Patents by Inventor Yoshiaki Takizawa

Yoshiaki Takizawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged-particle beam lithographic system
    Patent number: 9362085
    Abstract: A charged-particle beam lithographic system (100) delineates a pattern on a substrate (2) by directing a charged-particle beam (L) at the substrate. The system (100) includes a substrate stage (10) on which the substrate (2) is disposed and a substrate cover (20). The cover (20) has a frame portion (22) that covers an outer peripheral portion of the substrate (2) as viewed within a plane. The frame portion (22) has a first part (22a) disposed on the stage (10) and a second part (22b) capable of being loaded and unloaded on and from the stage (10) by a transport portion (40). When the second part (22b) is loaded on the stage (10), it is electrically grounded.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: June 7, 2016
    Assignee: JEOL Ltd.
    Inventors: Noriyuki Kobayashi, Yoshiaki Takizawa
  • Charged-Particle Beam Lithographic System
    Publication number: 20150303027
    Abstract: A charged-particle beam lithographic system (100) delineates a pattern on a substrate (2) by directing a charged-particle beam (L) at the substrate. The system (100) includes a substrate stage (10) on which the substrate (2) is disposed and a substrate cover (20). The cover (20) has a frame portion (22) that covers an outer peripheral portion of the substrate (2) as viewed within a plane. The frame portion (22) has a first part (22a) disposed on the stage (10) and a second part (22b) capable of being loaded and unloaded on and from the stage (10) by a transport portion (40). When the second part (22b) is loaded on the stage (10), it is electrically grounded.
    Type: Application
    Filed: February 18, 2015
    Publication date: October 22, 2015
    Inventors: Noriyuki Kobayashi, Yoshiaki Takizawa