Abstract: A bus bar module includes a circuit body, a bus bar, a holder, and a cover configured to be assembled to the holder to protect the circuit body and the holder. The circuit body includes a belt-like main line that extends in a first direction, a belt-like branch line that extends from the main line so as to branch from the main line, and a connection portion provided in a position closer to a distal end of the branch line than a folded portion the branch line. The cover is structured so as to be stretchable and shrinkable in the first direction in accordance with a stretching and a shrinking of the holder in the first direction.

Abstract: A bus bar module includes a circuit body, a bus bar, a holder, and a cover configured to be assembled to the holder to protect the circuit body and the holder. The circuit body includes a belt-like main line that extends in a first direction, a belt-like branch line that extends from the main line so as to branch from the main line, and a connection portion provided in a position closer to a distal end of the branch line than a folded portion the branch line. The cover is structured so as to be stretchable and shrinkable in the first direction in accordance with a stretching and a shrinking of the holder in the first direction.

Abstract: In a light emitting device, in a bottom surface of a cavity of a Si substrate, slit-shaped through holes and through electrodes that fill the through holes are provided at a position facing a first element electrode of a light emitting element. A length of an upper surface of the through electrode in a long axis direction is larger than a height of the through electrode in a thickness direction of the Si substrate. A joining layer having a shape corresponding to a shape of the upper surface of the through electrode is disposed between the first element electrode of the light emitting element and the upper surface of the through electrode facing the first element electrode. The entire upper surface of the through electrode is joined to the first element electrode via the joining layer.

Abstract: In a biaxial optical deflector, multiple mirror units are arranged in an array. Each of the mirror units includes one mirror and one mirror driver coupled to said mirror for rocking the mirror.

Abstract: A two-dimensional optical deflector includes a first SOI structure and a second SOI structure. A height of a monocrystalline silicon support layer of the first SOI structure is smaller than a height of a monocrystalline silicon support layer of the second SOI structure. A mirror includes a monocrystalline silicon active layer of the first SOI structure. An inner frame, an inner piezoelectric actuator and an outer frame include a monocrystalline silicon active layer of the first SOI structure and the monocrystalline silicon active layer of the second SOI structure. An outer piezoelectric actuator includes the monocrystalline silicon active layer of the first SOI structure.

Abstract: In a two-dimensional optical deflector including: a mirror; two first torsion bars coupled to the mirror along a first axis; an inner frame surrounding the mirror; two piezoelectric actuators each coupled between the first torsion bars and supported by the inner frame; an outer frame surrounding the inner frame; and two second torsion bars coupled between the inner frame and the outer frame along a second axis; a first permanent magnet layer formed on at least a part of a rear-side surface of the inner frame. A base supports the outer frame. A coil is formed at the base. A magnetic flux generated from the coil interacts with a magnetic flux of the first permanent magnetic layer.

Abstract: A piezoelectric device includes a substrate; an insulating layer provided on the substrate; a lower electrode layer provided on the insulating layer; a piezoelectric structure provided on the lower electrode layer, the piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching the conductive layer, the conductive layer having the same crystal structure as that of the piezoelectric layers; and an upper electrode layer provided on the piezoelectric structure.

Abstract: A piezoelectric device includes a substrate; an insulating layer provided on the substrate; a lower electrode layer provided on the insulating layer; a piezoelectric structure provided on the lower electrode layer, the piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching the conductive layer, the conductive layer having the same crystal structure as that of the piezoelectric layers; and an upper electrode layer provided on the piezoelectric structure.

Abstract: In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.

Abstract: In a biaxial optical deflector, multiple mirror units are arranged in an array. Each of the mirror units includes one mirror and one mirror driver coupled to said mirror for rocking the mirror.

Abstract: In a two-dimensional optical deflector including: a mirror; two first torsion bars coupled to the mirror along a first axis; an inner frame surrounding the mirror; two piezoelectric actuators each coupled between the first torsion bars and supported by the inner frame; an outer frame surrounding the inner frame; and two second torsion bars coupled between the inner frame and the outer frame along a second axis; a first permanent magnet layer formed on at least a part of a rear-side surface of the inner frame. A base supports the outer frame. A coil is formed at the base. A magnetic flux generated from the coil interacts with a magnetic flux of the first permanent magnetic layer.

Abstract: The object of the present invention is to provide a method of producing low valence titanium oxides in a steady supply manner acceptable in industrial production. The low valence titanium oxides are produced by electrical discharge between two electrodes in an aqueous medium, wherein at least one of the electrodes is a titanium-containing electrode.

Abstract: A two-dimensional optical deflector includes a first SOI structure and a second SOI structure. A height of a monocrystalline silicon support layer of the first SOI structure is smaller than a height of a monocrystalline silicon support layer of the second SOI structure. A mirror includes a monocrystalline silicon active layer of the first SOI structure. An inner frame, an inner piezoelectric actuator and an outer frame include a monocrystalline silicon active layer of the first SOI structure and the monocrystalline silicon active layer of the second SOI structure. An outer piezoelectric actuator includes the monocrystalline silicon active layer of the first SOI structure.

Abstract: An optical deflecting mirror device includes a circular or elliptical mirror with a reflective front surface, and a figure “8”-shaped reinforcement rib provided on a rear surface of the mirror symmetrically along a rocking axis of the mirror. The figure “8”-shaped reinforcement rib includes two ring-shaped reinforcement ribs coupled to each other along the rocking axis.

Abstract: An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A1 includes a control circuit 20 that detects a mechanical natural frequency relevant to swinging about a second axis X2 of a movable part 9. The control circuit 20 applies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuators 10a and 10b. The control circuit 20 removes a frequency component, which is equal to or greater than a second threshold value G2 within a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body 62, from a drive voltage.

Abstract: In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.

Abstract: In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.

Abstract: A light scattering element 1 is equipped with a transparent, thin film-like optical element 2 which scatters incident laser light, and a thin film-like piezoelectric element 4, which is sandwiched between two electrodes 3a, 3b and which is laminated on a surface of the optical element 2 that is different from an optical scattering surface 2a. The light scattering element 1 averages a speckle pattern of laser light scatted by the optical scattering surface 2a and emitted therefrom by vibration of the piezoelectric element 4 generated when alternating voltage is applied between the two electrodes 3a, 3b.

Abstract: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.

Abstract: A headlamp for a vehicle includes a light source adapted to emit a spotlight, a lens adapted to receive and transmit the spotlight, a lens actuator adapted to adjust a size of the spotlight transmitted through the lens, a two-dimensional optical deflector adapted to deflect the spotlight from the lens to an illumination area ahead of the vehicle, and a control circuit configured to control the lens actuator in such a way that irregularity of illumination in the illumination area is avoided.