Patents by Inventor Yoshiaki Yodo
Yoshiaki Yodo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200357696Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side or a front side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form modified layers in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of heating the polyolefin sheet in each of the plurality of separate regions corresponding to each device chip, pushing up each device chip through the polyolefin sheet, then picking up each device chip from the polyolefin sheet.Type: ApplicationFiled: May 8, 2020Publication date: November 12, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200343095Abstract: A stacked wafer processing method for processing one wafer of a stacked wafer having at least two layers laminated, includes a sheet laying step of laying a thermocompression bonding sheet on an upper face of the one wafer, a thermocompression bonding step of thermocompression-bonding the thermocompression bonding sheet to an outer peripheral portion of the one wafer where a chamfered portion is formed, a modified layer forming step of irradiating the stacked wafer with a laser beam having a transmission wavelength to the thermocompression bonding sheet and the one wafer from the thermocompression bonding sheet side with a focal point of the laser beam positioned inside the outer peripheral portion of the one wafer, thereby continuously forming a modified layer inside the one wafer, and a chamfered portion removing step of expanding the thermocompression bonding sheet to break the chamfered portion, thereby removing the chamfered portion from the one wafer.Type: ApplicationFiled: April 23, 2020Publication date: October 29, 2020Inventors: Shigenori HARADA, Yoshiaki YODO, Koji WATANABE, Jinyan ZHAO
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Publication number: 20200335382Abstract: A processing method for a workpiece, which includes a stacking step of stacking a sheet and a flat plate on a front side of the workpiece to form a stack, a thermocompression bonding step of thermocompression bonding the sheet to the workpiece while planarizing the sheet with the flat plate by heating the sheet and applying an external force to the stack, a holding step of holding the workpiece via the sheet by a holding table having a transparent portion, an alignment step of performing an alignment by imaging the workpiece through the transparent portion and the sheet, and a processing step of processing the workpiece by a processing unit.Type: ApplicationFiled: April 3, 2020Publication date: October 22, 2020Inventors: Naoko YAMAMOTO, Yoshiaki YODO, Atsuhi KUBO
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Publication number: 20200328118Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side or a front side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form modified layers in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of blowing out air to push up each device chip and picking up each device chip from the polyester sheet.Type: ApplicationFiled: March 27, 2020Publication date: October 15, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200328117Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side or a front side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form modified layers in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of blowing out air to push up each device chip and picking up each device chip from the polyolefin sheet.Type: ApplicationFiled: March 27, 2020Publication date: October 15, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200286784Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side or a front side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form modified layers in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of picking up each device chip from the polyolefin sheet.Type: ApplicationFiled: February 24, 2020Publication date: September 10, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200286785Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side or a front side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form modified layers in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of picking up each device chip from the polyester sheet.Type: ApplicationFiled: February 24, 2020Publication date: September 10, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200266102Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of applying an ultrasonic wave to the polyolefin sheet in each region of the polyolefin sheet corresponding to each device chip, pushing up each device chip from the polyolefin sheet side to pick up each device chip from the polyolefin sheet.Type: ApplicationFiled: January 28, 2020Publication date: August 20, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200266090Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of applying an ultrasonic wave to the polyester sheet in each region of the polyester sheet corresponding to each device chip, pushing up each device chip from the polyester sheet side to pick up each device chip from the polyester sheet.Type: ApplicationFiled: January 27, 2020Publication date: August 20, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200235010Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of cooling the polyolefin sheet in each region of the polyolefin sheet corresponding to each device chip, pushing up each device chip from the polyolefin sheet side to pick up each device chip from the polyolefin sheet.Type: ApplicationFiled: January 15, 2020Publication date: July 23, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200235011Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of cooling the polyester sheet in each region of the polyester sheet corresponding to each device chip, pushing up each device chip from the polyester sheet side to pick up each device chip from the polyester sheet.Type: ApplicationFiled: January 15, 2020Publication date: July 23, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Patent number: 10720355Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of picking up each device chip from the polyolefin sheet.Type: GrantFiled: October 10, 2019Date of Patent: July 21, 2020Assignee: DISCO CORPORATIONInventors: Shigenori Harada, Minoru Matsuzawa, Hayato Kiuchi, Yoshiaki Yodo, Taro Arakawa, Masamitsu Agari, Emiko Kawamura, Yusuke Fujii, Toshiki Miyai, Makiko Ohmae
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Publication number: 20200185253Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of heating the polyester sheet in each region of the polyester sheet corresponding to each device chip, pushing up each device chip from the polyester sheet side to pick up each device chip from the polyester sheet.Type: ApplicationFiled: December 5, 2019Publication date: June 11, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200185252Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of heating the polyolefin sheet in each region of the polyolefin sheet corresponding to each device chip, pushing up each device chip from the polyolefin sheet side to pick up each device chip from the polyolefin sheet.Type: ApplicationFiled: November 26, 2019Publication date: June 11, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200144049Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of blowing air to each device chip through the polyolefin sheet to push up each device chip, thereby picking up each device chip from the polyolefin sheet after performing the dividing step.Type: ApplicationFiled: November 5, 2019Publication date: May 7, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200144048Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of blowing air to each device chip through the polyester sheet to push up each device chip, thereby picking up each device chip from the polyester sheet after performing the dividing step.Type: ApplicationFiled: November 5, 2019Publication date: May 7, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200126799Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of picking up each device chip from the polyester sheet.Type: ApplicationFiled: October 11, 2019Publication date: April 23, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200126859Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of applying a laser beam to the wafer to form division grooves in the wafer, thereby dividing the wafer into individual device chips, and a pickup step of picking up each device chip from the polyolefin sheet.Type: ApplicationFiled: October 10, 2019Publication date: April 23, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200083104Abstract: A wafer processing method includes a polyester sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyester sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyester sheet as applying a pressure to the polyester sheet to thereby unite the wafer and the ring frame through the polyester sheet by thermocompression bonding, a dividing step of cutting the wafer by using a cutting apparatus to thereby divide the wafer into individual device chips, and a pickup step of applying an ultrasonic wave to the polyester sheet, pushing up each device chip through the polyester sheet, and then picking up each device chip from the polyester sheet.Type: ApplicationFiled: August 29, 2019Publication date: March 12, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE
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Publication number: 20200083103Abstract: A wafer processing method includes a polyolefin sheet providing step of positioning a wafer in an inside opening of a ring frame and providing a polyolefin sheet on a back side of the wafer and on a back side of the ring frame, a uniting step of heating the polyolefin sheet as applying a pressure to the polyolefin sheet to thereby unite the wafer and the ring frame through the polyolefin sheet by thermocompression bonding, a dividing step of cutting the wafer by using a cutting apparatus to thereby divide the wafer into individual device chips, and a pickup step of applying an ultrasonic wave to the polyolefin sheet, pushing up each device chip through the polyolefin sheet, and then picking up each device chip from the polyolefin sheet.Type: ApplicationFiled: August 29, 2019Publication date: March 12, 2020Inventors: Shigenori HARADA, Minoru MATSUZAWA, Hayato KIUCHI, Yoshiaki YODO, Taro ARAKAWA, Masamitsu AGARI, Emiko KAWAMURA, Yusuke FUJII, Toshiki MIYAI, Makiko OHMAE