Patents by Inventor Yoshida Yoshiyuki

Yoshida Yoshiyuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for Generating Gas Having Extremely Low Oxygen Concentration, Processing System and Thin Film Depositing Method Therewith, and Inert Gas Generated as Such
    Publication number: 20100178437
    Abstract: A gas, which has extremely low oxygen and water content without particles for industrial use and is effective in processes including an oxidation preventing step, can be supplied in a large quantity. An apparatus for generating such gas having extremely low oxygen/water content is provided with an oxygen molecule discharging apparatus (26) comprising a hollow ceramic solid electrolyte body (21), through which a gas passes, and metal tube bodies (20), all of which are adhered to each other in a leak-tight manner.
    Type: Application
    Filed: March 14, 2008
    Publication date: July 15, 2010
    Inventors: Naoki Shirakawa, Yoshida Yoshiyuki, Endo Kazuhiko, Mino Tetsuya