Abstract: The present invention provides a liquid crystal projector including a plurality of liquid crystal panels, a prism for compositing the modulated plural color lights to generate a color image, top and bottom metal plates disposed above and below the prism, and an optical system for magnifying and projecting the generated color image, wherein the liquid crystal panels are directly adhered to metal hold plates, and the metal hold plates are fixed to the top and bottom metal plates such that the emergent surfaces of the liquid crystal panels face the incident surfaces of the prism. Further, a closed space is provided between the incident surfaces of the prism and the emergent surfaces of the liquid crystal panels so as to prevent air contaminants from effecting the performance of the device.

Abstract: The invention provides a liquid crystal projector which can blast an increased amount of cooling air to raise the cooling efficiency without increasing the size of an optical prism unit. The liquid crystal projector includes a dichroic prism, a base for securing the dichroic prism with a lower plate interposed therebetween, a plurality of liquid crystal panel units disposed on side faces of the dichroic prism, and a cooling fan disposed below the base. The base has air holes formed therein such that air current generated by the cooling fan is introduced to the liquid crystal panel units through the air holes to cool the liquid crystal panel units. The lower plate has inclined faces at portions thereof which oppose to the air holes of the base.

Abstract: A method for cleaning a polishing tool capable of reliably removing deposited solidified abrasive and impurities and thereby capable of suppressing scratching of a polished object and reducing residual particles on the polished face of the polished object, comprising the steps of arranging with respect to the polishing tool a cleaning member provided with facing surfaces for forming clearances with cleaned surfaces of the polishing tool feeding a cleaning solution to clearances formed between the facing surfaces and the cleaned surfaces to form cleaning solution films, and cleaning the cleaned surfaces by rotating the polishing tool, the cleaning solution being fed to clearances between the cleaned surfaces and the facing surfaces through feed ports formed in the cleaning member and opened in the facing surfaces, and a polishing method and polishing apparatus using the same.

Abstract: The invention provides a liquid crystal projector which can blast an increased amount of cooling air to raise the cooling efficiency without increasing the size of an optical prism unit. The liquid crystal projector includes a dichroic prism, a base for securing the dichroic prism with a lower plate interposed therebetween, a plurality of liquid crystal panel units disposed on side faces of the dichroic prism, and a cooling fan disposed below the base. The base has air holes formed therein such that air current generated by the cooling fan is introduced to the liquid crystal panel units through the air holes to cool the liquid crystal panel units. The lower plate has inclined faces at portions thereof which oppose to the air holes of the base.

Abstract: A polishing apparatus and a polishing method capable of suppressing an excessive polishing of an outer circumferential edge surface of a surface to be polished of a polished object to be polished due to elastic deformation of a polishing tool and capable of stabilizing a polishing rate, wherein polishing is carried out by inclining a shaft of a polishing tool with an angle &agr; toward a direction of advance of the movement of the polishing tool to a direction perpendicular to a holding surface of a rotation table, then inclining the shaft of the polishing tool in a direction reducing elastic deformation of a polishing surface in a region where the polishing surface rides up on an outer circumferential edge of a surface to be polished of a wafer to the direction perpendicular to the holding face.

Abstract: The present invention provides a positioning mechanism for positioning, on a processing apparatus, a device mounted on a pallet transported by a conveyor to the processing apparatus. The positioning mechanism is provided with an information communication arrangement capable of storing adjustment data of the device by preceding processing apparatus. The data stored in the information communication arrangement is used in processing the device by the processing apparatus to enable the processing apparatus to process the device using the least number of necessary processing steps.