Abstract: For execution of substrate processing using multiple processing units available in parallel, two or more processing units to be used in parallel are selected from the multiple processing units such that an conveying-out standby time does not exceed a given permissible time. The conveying-out standby time is a time when a substrate after subjected to substrate processing by the processing unit is placed in standby until the substrate is transported from the processing unit by a transporting part. A schedule is made that includes processing by the transporting part of transporting a substrate toward the two or more processing units, substrate processing by the two or more processing units, and processing by the transporting part of transporting a substrate from the two or more processing units. The processing unit and the transporting part are controlled to execute substrate processing on multiple substrates in order according to the schedule.

Abstract: Provided is a substrate conveyance method where a segment which can simultaneously hold M pieces of substrates defined by an integer M of 2 or more is provided, and a substrate conveyance part can simultaneously convey N pieces of substrates defined by an integer N of 2 or more which is not a divisor of the integer M from the segment or toward the segment. The substrate conveyance part performs a substrate conveyance cycle repeatedly where when N pieces of variables ik defined by integers k of 1 to N are arbitrary integers of 0 or more and not more than (M/N) and satisfy a relationship of M=N×i1+ . . . +1×iN, a conveyance step where a substrate conveyance step of simultaneously conveying (N?k?1) pieces of substrates from the segment or toward the segment by the substrate conveyance part is performed ik times is performed with respect to the conveyance step where the number of times of the substrate conveyance steps is defined by each variable which is a natural number out of N pieces of variables ik.

Abstract: For execution of substrate processing using multiple processing units available in parallel, two or more processing units to be used in parallel are selected from the multiple processing units such that an conveying-out standby time does not exceed a given permissible time. The conveying-out standby time is a time when a substrate after subjected to substrate processing by the processing unit is placed in standby until the substrate is transported from the processing unit by a transporting part. A schedule is made that includes processing by the transporting part of transporting a substrate toward the two or more processing units, substrate processing by the two or more processing units, and processing by the transporting part of transporting a substrate from the two or more processing units. The processing unit and the transporting part are controlled to execute substrate processing on multiple substrates in order according to the schedule.

Abstract: Provided is a substrate conveyance method where a segment which can simultaneously hold M pieces of substrates defined by an integer M of 2 or more is provided, and a substrate conveyance part can simultaneously convey N pieces of substrates defined by an integer N of 2 or more which is not a divisor of the integer M from the segment or toward the segment. The substrate conveyance part performs a substrate conveyance cycle repeatedly where when N pieces of variables ik defined by integers k of 1 to N are arbitrary integers of 0 or more and not more than (M/N) and satisfy a relationship of M=N×i1+ . . . +1×iN, a conveyance step where a substrate conveyance step of simultaneously conveying (N?k?1) pieces of substrates from the segment or toward the segment by the substrate conveyance part is performed ik times is performed with respect to the conveyance step where the number of times of the substrate conveyance steps is defined by each variable which is a natural number out of N pieces of variables ik.

Abstract: A method of manufacturing printed circuit sheets which is capable of efficiently manufacturing printed circuit sheets from a base sheet composed of a base material in a sheet form having applied at least on one surface an electrically conductive foil.

Abstract: This is directed to an electronic circuit apparatus using a flexible printed wiring board having a conductive leaf formed on the surfaces of a flexible base material such as phenol resin or the like, wherein a circuit conductive leaf is formed on at least the single face of a flexible base material and a peripheral edge leaf is formed on the periphery of the flexible base material. An electronic parts is mounted and connected to the circuit conductive leaf. Since the flexible base material is extremely thin and flexible, the electronic circuit apparatus can be constructed smaller and thinner.