Abstract: Provided is a micro head having a simple structure and yet entailing extremely little backlash. A micro head includes a spindle, a sleeve, a thimble, a backlash absorbing member, and a collar, wherein the cylindrical backlash absorbing member is fixed to the sleeve in a state where the spindle is inserted at a position in the sleeve.

Abstract: A stage mechanism includes a feed screw, a fixed stage having a space portion incorporating the feed screw, a movable stage, and a backlash absorbing portion. The feed screw has a first end portion and a second end portion. The stage mechanism further includes a deviation preventing portion preventing the feed screw from deviating in a direction toward the first end portion and a pressing force adjusting portion adjusting the pressing force by which the feed screw is pressed in a direction from the second end portion side to the first end portion. The deviation preventing portion is in contact with a wall of the space portion on the first end portion side. The pressing force adjusting portion is in line contact with and presses the second end portion.

Abstract: Provided is a micro head having a simple structure and yet entailing extremely little backlash. A micro head includes a spindle, a sleeve, a thimble, a backlash absorbing member, and a collar, wherein the cylindrical backlash absorbing member is fixed to the sleeve in a state where the spindle is inserted at a position in the sleeve.

Abstract: Provided is a compact stage mechanism entailing little backlash and little play in a direction along the axis of a feed screw. A stage mechanism 10 includes a feed screw 11, a fixed stage 13 having a space portion 13a incorporating the feed screw, a movable stage 15, and a backlash absorbing portion 17. The feed screw has a first end portion 11d and a second end portion 11e. The stage mechanism further includes a deviation preventing portion 19 preventing the feed screw from deviating in a direction toward the first end portion and a pressing force adjusting portion 21 adjusting the pressing force by which the feed screw is pressed in a direction from the second end portion side to the first end portion. The deviation preventing portion is in contact with a wall 13b of the space portion on the first end portion side. The pressing force adjusting portion is in line contact with and presses the second end portion.

Abstract: A wire clamper for a bonding apparatus includes a pair of clamper arms having tip portions, respectively. The tip portions clamp or release a wire therebetween when at least one of the clamper arms is operated. The wire clamper further includes a giant-magnetostrictive actuator having a giant-magnetostrictive alloy and a coil wound around the giant-magnetostrictive alloy for generating a magnetic field. The giant-magnetostrictive alloy is displaced according to the magnetic field generated by the coil so as to operate at least one of the clamper arms.