Patents by Inventor Yoshiharu Utumi

Yoshiharu Utumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aluminum nitride film substrate and process for producing same
    Patent number: 5571603
    Abstract: An aluminum nitride film substrate comprising a single crystal diamond having, on its (111) plane, (1) a C-axis oriented aluminum nitride film or (2) an aluminum nitride single crystal film, the C-plane of the aluminum nitride single crystal being parallel to the (111) plane of said single crystal diamond an aluminum nitride film substrate comprising a substrate having thereon a (111) direction oriented diamond polycrystalline film, and further having thereon a C-axis oriented aluminum nitride film; and process for producing these aluminum nitride film substrate.
    Type: Grant
    Filed: February 24, 1995
    Date of Patent: November 5, 1996
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Yoshiharu Utumi, Takahiro Imai, Naoji Fujimori