Abstract: Memory cells (MC) are formed at intersections of bit lines (BL) extending in the X direction and word lines (WL) extending in the Y direction. A plurality of basic array planes sharing the word lines (WL), each formed for a group of bit lines (BL) aligned in the Z direction, are arranged side by side in the Y direction. In each basic array plane, bit lines in even layers and bit lines in odd layers are individually connected in common. Each of selection switch elements (101 to 104) controls switching of electrical connection/non-connection between the common-connected even layer bit line and a global bit line (GBL), and each of selection switch elements (111 to 114) control switching of connection/non-connection between the common-connected odd layer bit line and the global bit line (GBL).

Abstract: A position-control stage is disclosed which makes it possible to extend largely an angular movement in circular direction for position control, rendering the stage itself compact in construction, allowing to work with high precision in clean environment and further produce the stage with inexpensive cost. The position-control stage has an onboard linear motor composed of armature windings of primary side and field magnets of secondary side. The armature windings are each made in a hollow rectangle where winding turns are wound in the form of flat loop, and are circularly arranged on a disc surface of the bed along a preselected curvature in such a way lying in radial juxtaposition in circumferential direction. The field magnets are made in a flat shape and arranged underneath the turntable in such a pattern lying radially on a disc surface of the preselected curvature in opposition to the armature windings, with their unlike poles alternating in polarity along a circular direction.

Abstract: A position-control stage is disclosed which makes it possible to extend largely an angular movement in circular direction for position control, rendering the stage itself compact in construction, allowing to work with high precision in clean environment and further produce the stage with inexpensive cost. The position-control stage has an onboard linear motor composed of armature windings of primary side and field magnets of secondary side. The armature windings are each made in a hollow rectangle where winding turns are wound in the form of flat loop, and are circularly arranged on a disc surface of the bed along a preselected curvature in such a way lying in radial juxtaposition in circumferential direction. The field magnets are made in a flat shape and arranged underneath the turntable in such a pattern lying radially on a disc surface of the preselected curvature in opposition to the armature windings, with their unlike poles alternating in polarity along a circular direction.