Abstract: A disclosed flow rate sensor has a heat element and a plurality of temperature detectors, and in a state in which the heat element generates heat, a flow rate of a fluid flowing on the temperature detectors is detected, based on temperature detection results of each of the temperature detectors. The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part provided on the semiconductor substrate, and the heat element and the plurality of temperature detectors provided on the diaphragm part. The diaphragm part has a thin film structure part that covers the opening, and in a plan view, the plurality of temperature detectors are arranged in a periphery of the heat element.

Abstract: A disclosed flow rate sensor (1) has a heat element (40) and a plurality of temperature detectors (30 through 33), and in a state in which the heat element (40) generates heat, a flow rate of a fluid flowing on the temperature detectors (30 through 33) is detected, based on temperature detection results of each of the temperature detectors (30 through 33). The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part (20) provided on the semiconductor substrate, and the heat element (40) and the plurality of temperature detectors (30 through 33) provided on the diaphragm part (20). The diaphragm part (20) has a thin film structure part (20t) that covers the opening, and in a plan view, the plurality of temperature detectors (30 through 33) are arranged in a periphery of the heat element (40).

Abstract: A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.

Abstract: A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.