Abstract: A liquid discharging head includes a pressure chamber partitioning portion that includes a plurality of partitioning walls that partition a pressure chamber in which a pressure to discharge a liquid is applied to the liquid, a diaphragm that includes a wall surface that faces the pressure chamber, The pressure chamber is located between the partitioning walls in a second direction. The wall surface of the diaphragm includes a first portion at a first position, and a second portion. A position of the second portion in the first direction is on an opposite side in the first direction with respect to a position of the first portion in the first direction.

Abstract: A plurality of wall surfaces that constitute inner walls of the pressure compartment includes a surface of the recessed portion and the first wall surface, and an angle formed by the first surface and the first wall surface is greater than 90° and less than 180°.

Abstract: A liquid discharging head includes a pressure chamber partitioning portion that includes a plurality of partitioning walls that partition a pressure chamber in which a pressure to discharge a liquid is applied to the liquid, a diaphragm that includes a wall surface that faces the pressure chamber. The pressure chamber is located between the partitioning walls in a second direction. The wall surface of the diaphragm includes a first portion at a first position, and a second portion. A position of the second portion in the first direction is on an opposite side in the first direction with respect to a position of the first portion in the first direction.

Abstract: a plurality of wall surfaces that constitute inner walls of the pressure compartment includes a surface of the recessed portion and the first wall surface, and an angle formed by the first surface and the first wall surface is greater than 90° and less than 180°.

Abstract: A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Abstract: A piezoelectric device includes a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer provided between the first electrode and the second electrode, and a driving system that drives the piezoelectric element by applying voltage to the first electrode and the second electrode, in which the driving system drives the piezoelectric element at a maximum voltage that is lower than a voltage at which a tunnel current or a Poole-Frenkel current starts to be generated in the piezoelectric element.

Abstract: A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Abstract: A piezoelectric device includes a substrate that includes a piezoelectric element formed by stacking a piezoelectric layer, a first electrode and a second electrode such that the piezoelectric layer is interposed between the first electrode and the second electrode; and a wiring substrate that includes a driving element providing a signal for driving the piezoelectric element to the substrate. The substrate has an inspection region where a piezoelectric element for inspection which is a portion of the piezoelectric element is disposed. The wiring substrate has an electrode inspection region including an electrode to be inspected that is electrically connected to the piezoelectric element for inspection and is disposed on a surface side opposite to the substrate, and a flexible substrate mounting region which is disposed on the surface side opposite to the substrate, and is connected to a flexible substrate.

Abstract: A piezoelectric device includes a substrate in which a plurality of spaces are arranged so as to be partitioned by a plurality of walls, and a defining member defining a portion of each of the spaces in such a way as to cross between adjacent walls being among the walls and corresponding to the each of the spaces on one face of the substrate, a plurality of piezoelectric elements formed in such a way as to be each associated with a corresponding one of the spaces. a width of each of the walls denoted by a sign a, a height of each of the walls denoted by a sign b, a thickness of the defining member denoted by a sign t, and a size of each of movable regions denoted by the sign L satisfy a formula, t×L4/(a×b3)?5×105.

Abstract: A piezoelectric device includes a substrate that includes a piezoelectric element formed by stacking a piezoelectric layer, a first electrode and a second electrode such that the piezoelectric layer is interposed between the first electrode and the second electrode; and a wiring substrate that includes a driving element providing a signal for driving the piezoelectric element to the substrate. The substrate has an inspection region where a piezoelectric element for inspection which is a portion of the piezoelectric element is disposed. The wiring substrate has an electrode inspection region including an electrode to be inspected that is electrically connected to the piezoelectric element for inspection and is disposed on a surface side opposite to the substrate, and a flexible substrate mounting region which is disposed on the surface side opposite to the substrate, and is connected to a flexible substrate.

Abstract: A piezoelectric device includes a supporting body, a supporting layer that is stacked on the supporting body, a first electrode that is formed on a side opposite to the supporting body side of the supporting layer, a piezoelectric body that is formed on a side opposite to the supporting layer side of the first electrode, and a second electrode that is formed on a side opposite to the first electrode side of the piezoelectric body, in which the piezoelectric body is formed throughout an area covering the first electrode, the second electrode is formed throughout an area covering the piezoelectric body, and a recess portion which is recessed toward the supporting body is formed outside an area overlapping with the first electrode in the supporting layer.

Abstract: A piezoelectric device includes a substrate that includes a piezoelectric element formed by stacking a piezoelectric layer, a first electrode and a second electrode such that the piezoelectric layer is interposed between the first electrode and the second electrode; and a wiring substrate that includes a driving element providing a signal for driving the piezoelectric element to the substrate. The substrate has an inspection region where a piezoelectric element for inspection which is a portion of the piezoelectric element is disposed. The wiring substrate has an electrode inspection region including an electrode to be inspected that is electrically connected to the piezoelectric element for inspection and is disposed on a surface side opposite to the substrate, and a flexible substrate mounting region which is disposed on the surface side opposite to the substrate, and is connected to a flexible substrate.

Abstract: A piezoelectric device includes a substrate that includes a piezoelectric element formed by stacking a piezoelectric layer, a first electrode and a second electrode such that the piezoelectric layer is interposed between the first electrode and the second electrode; and a wiring substrate that includes a driving element providing a signal for driving the piezoelectric element to the substrate. The substrate has an inspection region where a piezoelectric element for inspection which is a portion of the piezoelectric element is disposed. The wiring substrate has an electrode inspection region including an electrode to be inspected that is electrically connected to the piezoelectric element for inspection and is disposed on a surface side opposite to the substrate, and a flexible substrate mounting region which is disposed on the surface side opposite to the substrate, and is connected to a flexible substrate.

Abstract: A piezoelectric device includes a supporting body, a supporting layer that is stacked on the supporting body, a first electrode that is formed on a side opposite to the supporting body side of the supporting layer, a piezoelectric body that is formed on a side opposite to the supporting layer side of the first electrode, and a second electrode that is formed on a side opposite to the first electrode side of the piezoelectric body, in which the piezoelectric body is formed throughout an area covering the first electrode, the second electrode is formed throughout an area covering the piezoelectric body, and a recess portion which is recessed toward the supporting body is formed outside an area overlapping with the first electrode in the supporting layer.

Abstract: A piezoelectric device includes a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer provided between the first electrode and the second electrode, and a driving system that drives the piezoelectric element by applying voltage to the first electrode and the second electrode, in which the driving system drives the piezoelectric element at a maximum voltage that is lower than a voltage at which a tunnel current or a Poole-Frenkel current starts to be generated in the piezoelectric element.

Abstract: A piezoelectric device includes a deformation portion, a non-deformation portion which hinders deformation of the elastic layer, and a piezoelectric element. The deformation portion includes a first area in which the piezoelectric element is disposed, a third area adjacent to the non-deformation portion, and a second area disposed between the first area and the third area. In the first area, the elastic layer, an insulation layer, the lower electrode layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the second area, the elastic layer, the insulation layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the third area, the elastic layer and the upper electrode layer are sequentially stacked. The elastic layer is silicon oxide, and impurities are added to the upper electrode layer in the silicon oxide in the third area.

Abstract: A piezoelectric device includes a deformation portion, a non-deformation portion which hinders deformation of the elastic layer, and a piezoelectric element. The deformation portion includes a first area in which the piezoelectric element is disposed, a third area adjacent to the non-deformation portion, and a second area disposed between the first area and the third area. In the first area, the elastic layer, an insulation layer, the lower electrode layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the second area, the elastic layer, the insulation layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the third area, the elastic layer and the upper electrode layer are sequentially stacked. The elastic layer is silicon oxide, and impurities are added to the upper electrode layer in the silicon oxide in the third area.