Abstract: A purpose of the present invention is to provide a wafer inspection apparatus wherein a solid contact area with the wafer is reduced, and the likelihood of dust emission due to abrasion is reduced. A wafer inspection device 10 comprises a turntable 200 having an annular wafer support part 202, and a clamping mechanism 206 including a holding claw 219 for clamping the wafer, wherein the wafer support part 202 has a contact portion 202a for contacting a lower surface of the wafer and a non-contact portion 202b that does not contact the lower surface of the wafer, the contact portion 202a and the non-contact portion 202b are alternately arranged in the circumferential direction of the turntable 200 so as to face the outer circumferential portion of the lower surface of the wafer 205, and are provided such that the length in the circumferential direction of the contact portion 202a is shorter than the length in the circumferential direction of the non-contact portion 202b.

Abstract: A three-dimensional shape measurement apparatus includes: a camera adjusted to bring a measurement target into focus; and a projector that projects a stripe pattern. A cycle of the stripe pattern projected by the projector is variable.

Abstract: Disclosed is a three-phase AC induction motor control device for controlling a torque based on a two-axis orthogonal coordinate system in synchronization with a power supply angular frequency, the control device including: a non-interference controller configured to receive a motor rotation speed, a torque command value, and a power supply voltage as an input and compute a torque axis non-interference compensation voltage and a magnetic flux axis non-interference compensation voltage by referencing a map stored in advance; and a non-interference magnetic flux response filter configured to perform filtering, including a direct transfer term and a rotor magnetic flux response delay, for the torque axis non-interference compensation voltage.

Abstract: Disclosed is a three-phase AC induction motor control device for controlling a torque based on a two-axis orthogonal coordinate system in synchronization with a power supply angular frequency, the control device including: a non-interference controller configured to receive a motor rotation speed, a torque command value, and a power supply voltage as an input and compute a torque axis non-interference compensation voltage and a magnetic flux axis non-interference compensation voltage by referencing a map stored in advance; and a non-interference magnetic flux response filter configured to perform filtering, including a direct transfer term and a rotor magnetic flux response delay, for the torque axis non-interference compensation voltage.

Abstract: In an electromagnetic actuator, an electromagnetic drive section forms a flux path between a plunger and an inner yoke, each member being made of magnetic material, and which drives the plunger in an axial direction through electromagnetic force, an operation section has a dog movable between a connection position where it is connected with a mating part and a release position where it is apart from the mating part in the axial direction, and which restrains movement of the mating part in a circumferential direction when the dog is at the connection position, and a retaining ring is interposed between the plunger and the dog such that relative movement of the dog to the plunger in the circumferential direction is permitted and relative movement of the dog to the plunger in the axial direction is restricted.

Abstract: A hybrid drive unit includes a power distribution mechanism for distributing a power from an engine to a first electric motor and to an output shaft; a transmission, which is arranged between the output shaft and a second electric motor in a manner to transmit a torque therebetween, and which is capable of setting an overdrive ratio where a speed of the output shaft is higher than that of a predetermined input element; and an engagement mechanism for connecting the engine selectively with the input element of the transmission, and for setting a speed change ratio of the transmission to the overdrive ratio. The hybrid drive unit is capable of setting an overdrive mode and is easy to be downsized.

Abstract: A hybrid drive unit that includes an input shaft connected to an engine; an output shaft connected to wheels; a first rotary electric machine; a second rotary electric machine connected to the output shaft; a power distribution device that distributes a rotational driving force of the input shaft to the output shaft and to the first rotary electric machine; a second rotary electric machine fixing device that selectively fixes a rotor of the second rotary electric machine; and a transmission cutoff device capable of cutting off transmission of rotation between the output shaft and the second rotary electric machine at least in a state when the rotor of the second rotary electric machine is fixed.

Abstract: A float-type oil-level detection apparatus is provided for detecting the surface of engine oil. A housing (81) for housing a float (82) has a through-hole (136) in the sidewall of the side opposite from the sidewall that faces the movement of the oil dipper (69).

Abstract: A body condition evaluation apparatus measures vicarious movement accompanying predetermined motion, and evaluates a physical condition of a body of a subject by using it as an index. A sensor unit 3L is mounted between a shoulder joint and a cubital joint of a left arm, a sensor unit 3R is mounted between a shoulder joint and a cubital joint of a right arm, a sensor unit 3C is mounted on a breast, and a sensor unit 3W is mounted on a navel. The respective sensors have a triaxial acceleration sensor 13. A movable range of the left arm is obtained on the basis of the sensor 3L, a movable range of the right arm is obtained on the basis of the sensor 3R, displacement widths of an upper body in a front-back direction and a right-left direction are obtained on the basis of the sensor 3C, and displacement widths of a lower back in a front-back direction and a right-left direction are obtained on the basis of the sensor 3W.

Abstract: In an electromagnetic actuator, an electromagnetic drive section forms a flux path between a plunger and an inner yoke, each member being made of magnetic material, and which drives the plunger in an axial direction through electromagnetic force, an operation section has a dog movable between a connection position where it is connected with a mating part and a release position where it is apart from the mating part in the axial direction, and which restrains movement of the mating part in a circumferential direction when the dog is at the connection position, and a retaining ring is interposed between the plunger and the dog such that relative movement of the dog to the plunger in the circumferential direction is permitted and relative movement of the dog to the plunger in the axial direction is restricted.

Abstract: A hybrid drive unit includes a power distribution mechanism for distributing a power from an engine to a first electric motor and to an output shaft; a transmission, which is arranged between the output shaft and a second electric motor in a manner to transmit a torque therebetween, and which is capable of setting an overdrive ratio where a speed of the output shaft is higher than that of a predetermined input element; and an engagement mechanism for connecting the engine selectively with the input element of the transmission, and for setting a speed change ratio of the transmission to the overdrive ratio. The hybrid drive unit is capable of setting an overdrive mode and is easy to be downsized.

Abstract: A float-type oil-level detection apparatus is provided for detecting the surface of engine oil. A housing (81) for housing a float (82) has a through-hole (136) in the sidewall of the side opposite from the sidewall that faces the movement of the oil dipper (69).

Abstract: A hybrid drive unit that includes an input shaft connected to an engine; an output shaft connected to wheels; a first rotary electric machine; a second rotary electric machine connected to the output shaft; a power distribution device that distributes a rotational driving force of the input shaft to the output shaft and to the first rotary electric machine; a second rotary electric machine fixing device that selectively fixes a rotor of the second rotary electric machine; and a transmission cutoff device capable of cutting off transmission of rotation between the output shaft and the second rotary electric machine at least in a state when the rotor of the second rotary electric machine is fixed.

Abstract: A cylinder tube of a second hydraulic cylinder is provided separate from a first piston of a first hydraulic cylinder and integrally fixed to an input shaft. Friction members of a first clutch and friction members of a second clutch are prevented from moving in a first direction by a snap ring attached to a connecting drum. The friction members of the first clutch are friction engaged by the first piston and the friction members of the second clutch are friction engaged by a second piston.

Abstract: A generator apparatus can provide generated power fit for a connected battery, and even if a load voltage is not within a suitable range, when the load voltage is a certain level or more, the generator can provide power. A selector 25 selects a target voltage for controlling the output voltage of a rectifier 2. An output controller 34 controls the rectifier 2 according to the target. A load judgment section 35 judges the terminal voltage of a battery 19. When the terminal voltage is within an allowable range with respect to the target value, permission for output is given to the output controller 34. When the load voltage is not within the allowable range, an alarm is raised. Even when the alarm is raised, if a load voltage develops which is not less than a predetermined voltage lower than the allowable range, the battery 19 can be charged by forced-output.