Patents by Inventor Yoshihiro Katsumata

Yoshihiro Katsumata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated module multi-chamber CVD processing system and its method for processing subtrates
    Patent number: 5534072
    Abstract: In a CVD processing system for depositing a blanket tungsten film, a distinct shadow is formed without causing any micro-peeling when the substrate fixture is separated from the substrate so as to prevent any blanket tungsten from being deposited on SiO.sub.2, thus reducing the occurrence of fine dust particles.
    Type: Grant
    Filed: June 16, 1993
    Date of Patent: July 9, 1996
    Assignee: Anelva Corporation
    Inventors: Shigeru Mizuno, Yoshihiro Katsumata, Nobuyuki Takahashi
  • Integrated module multi-chamber CVD processing system and its method for processing substrates
    Patent number: 5505779
    Abstract: In a CVD processing system for depositing a blanket tungsten film, a distinct shadow is formed without causing any micro-peeling when the substrate fixture is separated from the substrate so as to prevent any blanket tungsten from being deposited on SiO.sub.2, thus reducing the occurrence of fine dust particles.
    Type: Grant
    Filed: July 25, 1994
    Date of Patent: April 9, 1996
    Assignee: Anelva Corporation
    Inventors: Shigeru Mizuno, Yoshihiro Katsumata, Nobuyuki Takahashi
  • Integrated module multi-chamber CVD processing system and its method for processing substrates
    Patent number: 5494494
    Abstract: In a CVD processing system for depositing a blanket tungsten film, a distinct shadow is formed without causing any micro-peeling when the substrate fixture is separated from the substrate so as to prevent any blanket tungsten from being deposited on SiO.sub.2, thus reducing the occurrence of fine dust particles.
    Type: Grant
    Filed: July 25, 1994
    Date of Patent: February 27, 1996
    Assignee: Anelva Corporation
    Inventors: Shigeru Mizuno, Yoshihiro Katsumata, Nobuyuki Takahashi
  • apparatus for constituting musical sound signal
    Patent number: D383482
    Type: Grant
    Filed: January 16, 1996
    Date of Patent: September 9, 1997
    Assignee: Yamaha Corporation
    Inventor: Yoshihiro Katsumata