Patents by Inventor Yoshihiro Koura

Yoshihiro Koura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of controlling imprint apparatus, imprint apparatus, and method of manufacturing article
    Patent number: 11833736
    Abstract: A method of controlling an imprint process to form a pattern by using a mold on a substrate is provided. The method includes inspecting to determine whether to continue or stop a series of imprint processes during the series of imprint processes of a lot, wherein the inspecting includes capturing an image of the pattern formed on a shot region by the imprint process, obtaining, by comparing a position of a peripheral portion of the pattern in the image and a design value of the position of the peripheral portion, an extrusion amount of an imprint material from the shot region due to the imprint process, and determining, based on a change in the extrusion amount over a plurality of imprint processes, a next process to transition from a current process upon stopping the series of imprint processes.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: December 5, 2023
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yoshihiro Koura, Kunihiko Asada
  • METHOD OF CONTROLLING IMPRINT APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20200282630
    Abstract: A method of controlling an imprint process to form a pattern by using a mold on a substrate is provided. The method includes inspecting to determine whether to continue or stop a series of imprint processes during the series of imprint processes of a lot, wherein the inspecting includes capturing an image of the pattern formed on a shot region by the imprint process, obtaining, by comparing a position of a peripheral portion of the pattern in the image and a design value of the position of the peripheral portion, an extrusion amount of an imprint material from the shot region due to the imprint process, and determining, based on a change in the extrusion amount over a plurality of imprint processes, a next process to transition from a current process upon stopping the series of imprint processes.
    Type: Application
    Filed: March 4, 2020
    Publication date: September 10, 2020
    Inventors: Yoshihiro Koura, Kunihiko Asada