Patents by Inventor Yoshihiro Kuboto

Yoshihiro Kuboto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical waveguide apparatus and method for manufacturing the same
    Patent number: 7799589
    Abstract: An optical waveguide apparatus having a very simple structure that can modulate a signal light guided through an optical waveguide is provided. A photoresist 13 is applied to an upper side of an SOI film 12, a photoresist mask 14 is formed, and the SOI film in a region that is not covered with the photoresist mask 14 is removed by etching to obtain an optical waveguide 15 having a single-crystal silicon core. Further, a light emitting device capable of irradiating the single-crystal silicon core with a light having a wavelength of 1.1 ?m or below is provided on a back surface side of a quartz substrate 20 to provide an optical waveguide apparatus. When the light emitting device 30 does not apply a light, the light guided through the optical waveguide 15 is guided as it is.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: September 21, 2010
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Shoji Akiyama, Yoshihiro Kuboto, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka, Makoto Kawai