Patents by Inventor Yoshihiro Minami
Yoshihiro Minami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9887262Abstract: A semiconductor device includes a semiconductor layer and a first insulating film provided on the semiconductor layer. The first insulating film has a surface opposite to the semiconductor layer, the surface including a first portion, a second portion and a third portion between the first portion and the second portion. The device includes a first interconnection provided on a first portion and a second interconnection provided on the second portion. The first interconnection and the second interconnection extend in a first direction. The device further includes a conductor and a nitride layer. The conductor extends through the first insulating film in a second direction from each of the first interconnection and the second interconnection toward the semiconductor layer, and the conductor electrically connects the first interconnection to the semiconductor layer. The nitrided layer is provided at least on the third surface.Type: GrantFiled: August 27, 2015Date of Patent: February 6, 2018Assignee: Toshiba Memory CorporationInventors: Yoshihiro Minami, Jun Iijima, Tetsuya Shimizu, Takamasa Usui, Masayoshi Tagami
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Publication number: 20160247783Abstract: A semiconductor device includes a semiconductor layer and a first insulating film provided on the semiconductor layer. The first insulating film has a surface opposite to the semiconductor layer, the surface including a first portion, a second portion and a third portion between the first portion and the second portion. The device includes a first interconnection provided on a first portion and a second interconnection provided on the second portion. The first interconnection and the second interconnection extend in a first direction. The device further includes a conductor and a nitride layer. The conductor extends through the first insulating film in a second direction from each of the first interconnection and the second interconnection toward the semiconductor layer, and the conductor electrically connects the first interconnection to the semiconductor layer. The nitrided layer is provided at least on the third surface.Type: ApplicationFiled: August 27, 2015Publication date: August 25, 2016Applicant: Kabushiki Kaisha ToshibaInventors: Yoshihiro MINAMI, Jun IIJIMA, Tetsuya SHIMIZU, Takamasa USUI, Masayoshi TAGAMI
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Patent number: 8179710Abstract: A memory includes memory cells on a semiconductor layer, in which each of the memory cells includes a source layer and a drain layer in the semiconductor layer; an electrically floating body region provided in the semiconductor layer between the source layer and the drain layer and configured to accumulate or discharge electric charges in order to store logical data; a gate dielectric film provided on the body region and comprising a ferroelectric film with polarization characteristics; and a gate electrode provided on the gate dielectric film above the body region, wherein each memory cell stores a plurality of logical data depending on an amount of electric charges accumulated in the body region and on a polarization state of the ferroelectric film.Type: GrantFiled: March 23, 2010Date of Patent: May 15, 2012Assignee: Kabushiki Kaisha ToshibaInventor: Yoshihiro Minami
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Patent number: 7995369Abstract: This disclosure concerns a semiconductor memory device including bit lines; word lines; semiconductor layers arranged to correspond to crosspoints of the bit lines and the word lines; bit line contacts connecting between a first surface region and the bit lines, the first surface region being a part of a surface region of the semiconductor layers directed to the word lines and the bit lines; and a word-line insulating film formed on a second surface region adjacent to the first surface region, the second surface region being a part of out of the surface region, the word-line insulating film electrically insulating the semiconductor layer and the word line, wherein the semiconductor layer, the word line and the word-line insulating film form a capacitor, and when a potential difference is given between the word line and the bit line, the word-line insulating film is broken in order to store data.Type: GrantFiled: December 11, 2008Date of Patent: August 9, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Yoshihiro Minami, Ryo Fukuda, Takeshi Hamamoto
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Publication number: 20110188288Abstract: A memory includes a first conductive-type first diffusion layer on the semiconductor substrate; second conductive-type bodies on the first diffusion layer(s); first conductive-type second diffusion layers on the bodies; first gate dielectric films comprising ferroelectric films and provided on first side surfaces of the bodies; second gate dielectric films comprising ferroelectric films and provided on second side surfaces of the bodies; first gate electrodes on the first gate dielectric film; and second gate electrodes on the second gate dielectric film, wherein the first and the second diffusion layers, the body, the first and the second gate dielectric films, and the first and the second gate electrodes constitute memory cells, and each of the memory cells stores a plural pieces of logical data depending on a polarization state of the first gate dielectric film and on a polarization state of the second gate dielectric film.Type: ApplicationFiled: June 24, 2010Publication date: August 4, 2011Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Yoshihiro MINAMI
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Publication number: 20110182102Abstract: A memory includes memory cells on a semiconductor layer, in which each of the memory cells includes a source layer and a drain layer in the semiconductor layer; an electrically floating body region provided in the semiconductor layer between the source layer and the drain layer and configured to accumulate or discharge electric charges in order to store logical data; a gate dielectric film provided on the body region and comprising a ferroelectric film with polarization characteristics; and a gate electrode provided on the gate dielectric film above the body region, wherein each memory cell stores a plurality of logical data depending on an amount of electric charges accumulated in the body region and on a polarization state of the ferroelectric film.Type: ApplicationFiled: March 23, 2010Publication date: July 28, 2011Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Yoshihiro MINAMI
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Patent number: 7977738Abstract: A semiconductor memory device includes bodies electrically floating; sources; drains; gate electrodes, each of which is adjacent to one side surface of the one of the bodies via a gate dielectric film; plates, each of which is adjacent to the other side surface of the one of the bodies via a plate dielectric film; first bit lines on the drains, the first bit lines including a semiconductor with a same conductivity type as that of the drains; and emitters on the semiconductor of the first bit lines, the emitters including a semiconductor with an opposite conductivity type to that of the semiconductor of the first bit lines, wherein the emitters are stacked above the bodies and the drains.Type: GrantFiled: July 2, 2009Date of Patent: July 12, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Yoshihiro Minami, Takashi Ohsawa, Tomoaki Shino, Takeshi Hamamoto, Akihiro Nitayama
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Patent number: 7888139Abstract: A first electrode film, a ferroelectric film, and a second electrode film are accumulated above a semiconductor in this order, a hard mask is accumulated above the second electrode, scrub cleaning is performed on the surface of the hard mask with an surfactant, the hard mask on which the scrub cleaning is performed has been patterned according to a planar shape of a ferroelectric capacitor, and etching is performed by using as a hard mask the hard mask that has been patterned.Type: GrantFiled: August 27, 2009Date of Patent: February 15, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Yukiteru Matsui, Takeo Kubota, Yoshikuni Tateyama, Hiroyuki Kanaya, Yoshihiro Minami
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Publication number: 20100144062Abstract: A first electrode film, a ferroelectric film, and a second electrode film are accumulated above a semiconductor in this order, a hard mask is accumulated above the second electrode, scrub cleaning is performed on the surface of the hard mask with an surfactant, the hard mask on which the scrub cleaning is performed has been patterned according to a planar shape of a ferroelectric capacitor, and etching is performed by using as a hard mask the hard mask that has been patterned.Type: ApplicationFiled: August 27, 2009Publication date: June 10, 2010Inventors: Yukiteru MATSUI, Takeo Kubota, Yoshikuni Tateyama, Hiroyuki Kanaya, Yoshihiro Minami
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Publication number: 20100019304Abstract: A semiconductor memory device includes bodies electrically floating; sources; drains; gate electrodes, each of which is adjacent to one side surface of the one of the bodies via a gate dielectric film; plates, each of which is adjacent to the other side surface of the one of the bodies via a plate dielectric film; first bit lines on the drains, the first bit lines including a semiconductor with a same conductivity type as that of the drains; and emitters on the semiconductor of the first bit lines, the emitters including a semiconductor with an opposite conductivity type to that of the semiconductor of the first bit lines, wherein the emitters are stacked above the bodies and the drains.Type: ApplicationFiled: July 2, 2009Publication date: January 28, 2010Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yoshihiro MINAMI, Takashi Ohsawa, Tomoaki Shino, Takeshi Hamamoto, Akihiro Nitayama
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Publication number: 20090152610Abstract: This disclosure concerns a semiconductor memory device including bit lines; word lines; semiconductor layers arranged to correspond to crosspoints of the bit lines and the word lines; bit line contacts connecting between a first surface region and the bit lines, the first surface region being a part of a surface region of the semiconductor layers directed to the word lines and the bit lines; and a word-line insulating film formed on a second surface region adjacent to the first surface region, the second surface region being a part of out of the surface region, the word-line insulating film electrically insulating the semiconductor layer and the word line, wherein the semiconductor layer, the word line and the word-line insulating film form a capacitor, and when a potential difference is given between the word line and the bit line, the word-line insulating film is broken in order to store data.Type: ApplicationFiled: December 11, 2008Publication date: June 18, 2009Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yoshihiro Minami, Ryo Fukuda, Takeshi Hamamoto
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Publication number: 20090057763Abstract: This disclosure concerns a semiconductor memory device including an insulating film; a semiconductor layer provided on the insulating film; a source provided in the semiconductor layer; a drain provided in the semiconductor layer; a floating body provided between the source and the drain and being in an electrically floating state, carriers being accumulated in or emitted from the floating body to store data; a gate dielectric film provided on the floating body; a gate electrode provided on the gate dielectric film; a source and drain insulating film provided on the source and the drain, the source and drain insulating film being thinner than the gate dielectric film; and a silicide layer provided on the source and drain insulating film.Type: ApplicationFiled: August 21, 2008Publication date: March 5, 2009Applicant: Kabushiki Kaisha ToshibaInventor: Yoshihiro MINAMI
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Publication number: 20080237681Abstract: This disclosure concerns a semiconductor device comprising: a bulk substrate; an insulation layer provided on the bulk substrate; a semiconductor layer containing an active area on which a semiconductor element is formed, and a dummy active area isolated from the active area and not formed with a semiconductor element thereon, the semiconductor layer being provided on the insulation layer; and a supporting unit provided beneath the dummy active area to reach the bulk substrate piercing through the insulation layer, the supporting unit supporting the dummy active area.Type: ApplicationFiled: March 19, 2008Publication date: October 2, 2008Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Yoshihiro Minami
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Publication number: 20080111187Abstract: This disclosure concerns a semiconductor memory device comprising a semiconductor substrate; a buried insulating film provided on the semiconductor substrate; a semiconductor layer provided on the buried insulating film; an N-type source layer formed in the semiconductor layer; an N-type drain layer formed in the semiconductor layer; a body region formed in the semiconductor layer to be provided between the source layer and the drain layer, the body region being in an electrically floating state and holding data according to a state of accumulating majority carriers in the body region; a gate insulating film provided on the body region; a gate electrode provided on the gate insulating film; and a P-type diffusion layer provided on a surface of the semiconductor substrate present under the drain layer, wherein a conduction type of a surface of the semiconductor substrate present under the body region is an N type.Type: ApplicationFiled: November 13, 2007Publication date: May 15, 2008Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Yoshihiro MINAMI
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Publication number: 20070215916Abstract: This disclosure concerns a method of manufacturing a semiconductor device including preparing a support substrate including a surface region consisting of a semiconductor single crystal; forming a porous semiconductor layer by transforming the surface region of the support substrate into a porous layer; epitaxially growing a single-crystal semiconductor layer on the porous semiconductor layer; forming an opening reaching the porous semiconductor layer by removing a part of the single-crystal semiconductor layer; forming a cavity between the single-crystal semiconductor layer and the support substrate by removing the porous semiconductor layer through the opening; and filling the cavity with an insulating film or a conductive film.Type: ApplicationFiled: December 11, 2006Publication date: September 20, 2007Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yoshihiro MINAMI, Tomoaki SHINO
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Patent number: 7265419Abstract: A semiconductor memory device includes: a semiconductor device base having an insulating substrate and a semiconductor layer overlying it; a cell array formed on the semiconductor device base with cell transistors disposed in such a manner that each of source and drain layers is shared by adjacent two cell transistors arranged in a direction, the cell transistor having an electrically floating channel body to store data defined by a carrier accumulation state of the channel body; and logic transistors formed on the semiconductor device base to constitute a peripheral circuit of said cell array, wherein at least a part of source and drain layers of each the cell transistor is formed with a thickness different from source and drain layers of the logic transistors.Type: GrantFiled: January 25, 2005Date of Patent: September 4, 2007Assignee: Kabushiki Kaisha ToshibaInventor: Yoshihiro Minami
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Publication number: 20070091204Abstract: An image converting apparatus includes a memory which can store frame information of an image to be played, and an image processing section which can read frame information from the memory and convert the frame rate to a predetermined frame rate in response to a predetermined state and in accordance with the play state.Type: ApplicationFiled: October 6, 2006Publication date: April 26, 2007Applicant: Sony CorporationInventors: Mikio Koshimizu, Yasushi Sato, Takeo Tsumura, Yoshihiro Minami
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Patent number: 7154151Abstract: A semiconductor device comprises a semiconductor substrate; an embedded insulating layer provided on the semiconductor substrate; a semiconductor layer provided on the embedded insulating layer; a transistor including a first conductivity type source layer formed within the semiconductor layer, a first conductivity type drain layer formed in the semiconductor layer, and a channel forming region between the source layer and the drain layer; and an embedded insulating layer protective diode including a second conductivity type first diffusion layer and a first conductivity type second diffusion layer, the first diffusion layer being at the same potential as a semiconductor substrate region immediately below the channel forming region, the second diffusion layer being provided adjacently to the first diffusion layer and electrically connected to at least one of the source layer, the drain layer and the channel forming region.Type: GrantFiled: December 20, 2004Date of Patent: December 26, 2006Assignee: Kabushiki Kaisha ToshibaInventor: Yoshihiro Minami
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Patent number: 7075169Abstract: A hollow region is formed in a silicon substrate. A plurality of openings formed in the silicon layer on the hollow region is filled with a buried film. The bottom portion of the hollow region is formed with a plurality of silicon pillars, which support the silicon layer.Type: GrantFiled: September 4, 2003Date of Patent: July 11, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Yoshihiro Minami, Takashi Yamada, Yusuke Kohyama, Tsutomu Sato, Hajime Nagano
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Publication number: 20060113686Abstract: A semiconductor memory device includes: a semiconductor device base having an insulating substrate and a semiconductor layer overlying it; a cell array formed on the semiconductor device base with cell transistors disposed in such a manner that each of source and drain layers is shared by adjacent two cell transistors arranged in a direction, the cell transistor having an electrically floating channel body to store data defined by a carrier accumulation state of the channel body; and logic transistors formed on the semiconductor device base to constitute a peripheral circuit of said cell array, wherein at least a part of source and drain layers of each the cell transistor is formed with a thickness different from source and drain layers of the logic transistors.Type: ApplicationFiled: January 25, 2005Publication date: June 1, 2006Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Yoshihiro Minami