Abstract: A heater includes a plate-shaped part, one or more resistance heating element, a columnar part, and a plurality of relay conductors. The plate-shaped part has an insulation property and includes an upper surface on which a wafer is to be superimposed and a lower surface on an opposite side to the upper surface. The one or more resistance heating element is buried in the plate-shaped part. The columnar part has an insulation property and projects downward from the lower surface of the plate-shaped part. The plurality of relay conductors respectively include extension portions vertically extending inside the columnar part and are electrically connected to the one or more resistance heating elements.

Abstract: A board-like structure includes a base body, an internal conductor, and a terminal member. The base body is an insulating member including an upper surface and a lower surface on an opposite side to the upper surface. The internal conductor runs along the upper surface and the lower surface inside the base body. The terminal member is at least partially located inside the base body, is exposed to an external portion of the base body at the lower surface, and is electrically connected to the internal conductor. The terminal member includes an insulating terminal base part and a conductor layer on a surfaces of the terminal base part.

Abstract: A heater includes a base body, a resistance heating element, and a terminal part. The base body is made of ceramic and is plate shaped including an upper surface on which a wafer is superimposed and a lower surface on an opposite side to the upper surface. The resistance heating element is located inside the base body. The terminal part is electrically connected to the resistance heating element, is at least partially located inside the base body, and is exposed from, the lower surface of the base body to an exterior of the base body. The lower surface of the base body includes an adjacent region which surrounds the terminal part. The adjacent region includes an inclined surface in a portion reaching the terminal part.

Abstract: A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body.

Abstract: An electrostatic chuck includes an insulating base body including a predetermined surface, and an electrode inside the base body, which is layer shaped along the predetermined surface. An upper surface of the electrode facing a side where the predetermined surface is located and the base body are in contact. A gap which is rendered a vacuum or filled with a gas is interposed between a side surface of the electrode and the base body.

Abstract: A method for reinforcement learning performed by a computer is disclosed. The method includes: predicting a state of a target to be controlled in reinforcement learning at each time point to measure a state of the target, the time point being included in a period from a time point to determine a present action to a time point to determine a subsequent action; calculating a degree of risk concerning the state of the target at the each time point with respect to a constraint condition based on a result of prediction; specifying a search range concerning the present action to the target in accordance with the calculated degree of risk and a degree of impact of the present action to the target on the state of the target at the each time point; and determining the present action to the target based on the specified search range.

Abstract: A structure of the present disclosure includes a substrate made of an aluminum nitride-based ceramic, a power supply terminal made of tungsten or molybdenum, a bonding layer located between the substrate and the power supply terminal to be in contact with each thereof, and an internal electrode electrically connected to the power supply terminal. Then, in the bonding layer, a total of components constituting the power supply terminal and aluminum nitride is 90 vol % or more in a total volume of 100 vol % constituting the bonding layer.

Abstract: A computer-implemented reinforcement learning method includes determining, based on a target probability of satisfaction of a constraint condition related to a state of a control object and a specific time within which a controller causes the state of the control object not satisfying the constraint condition to be the state of the control object satisfying the constraint condition, a parameter of a reinforcement learner that causes, in a specific probability, the state of the control object to satisfy the constraint condition at a first timing following a second timing at which the state of control object satisfies the constraint condition; and determining a control input to the control object by either the reinforcement learner or the controller, based on whether the state of the control object satisfies the constraint condition at a specific timing.

Abstract: A reinforcement learning method executed by a computer includes calculating a degree of risk for a state of a controlled object at a current time point with respect to a constraint condition related to the state of the controlled object, the degree of risk being calculated based on a predicted value of the state of the controlled object at a future time point, the predicted value being obtained from model information defining a relationship between the state of the controlled object and a control input to the controlled object; and determining the control input to the controlled object at the current time point, from a range defined according to the calculated degree of risk so that the range becomes narrower as the calculated degree of risk increases.

Abstract: A reinforcement learning device includes a processor that determines a first action on a control target by using a basic controller that defines an action on the control target depending on a state of the control target. The processor performs a first reinforcement learning within a first action range around the first action in order to acquire a first policy for determining an action on the control target depending on a state of the control target. The first action range is smaller than a limit action range for the control target. The processor determines a second action on the control target by using the first policy. The processor updates the first policy to a second policy by performing a second reinforcement learning within a second action range around the second action. The second action range is smaller than the limit action range.

Abstract: Disclosed is a corrosion resistant member comprising a sintered material having an ?-Al2O3 crystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of Al2O3 and 2 to 30% by mass of Y in terms of Y2O3. The corrosion resistant member has a peak intensity ratio I116/I104 within the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein I116 and I104 represent peak intensities attributed to the (116) face and the (104) face, respectively, of an ?-Al2O3 crystal as measured by X-ray diffractometry on its surface layer.

Abstract: A mounting substrate configured to mount a functional element thereon is provided. The mounting substrate includes an insulating base having a flat surface portion and a bank portion protruding from the flat surface portion and dividing the flat surface portion into a plurality of regions; and a conductor layer configured to electrically connect the functional element thereto. The conductor layer is adhered from the flat surface portion to a side surface of the bank portion on the base, and the regions divided by the bank portion are filled with the conductor layer.

Abstract: A support for capillaries comprises a ceramic member having a flat surface area on which the capillaries are to be aligned. The flat surface area has a flatness of not more than 0.02 mm and has a mean spacing of waviness motifs (AW) of not more than 100 ?m.

Abstract: According to one embodiment of the present invention, a laminate structure comprises a laminate including a first substrate and a second substrate which is overlapped with the first substrate; and an exterior frame which surrounds a side surface of the laminate, and covers a region of both main surfaces of the laminate. Both of the first substrate and the second substrate have a through hole which is positioned at the region of the both main surfaces of the laminate. The exterior frame comprises a material which has lower elastic modulus than the laminate, and portions of the exterior frame extend into the through holes.

Abstract: A silicon nitride sintered material includes a silicon nitride crystal and a grain boundary layer that contains at least two of a first metal silicide (a metal silicide having, as a first metal element, at least one selected from the group consisting of Fe, Cr, Mn and Cu), a second metal silicide (a metal silicide having, as a second metal element, at least one of W or Mo) and a third metal silicide (a metal silicide having a plurality of metal elements including the first metal element and the second metal element), wherein the grain boundary layer has neighboring phase where at least two of the first through third metal silicides exist in contact with each other.

Abstract: Disclosed is a corrosion resistant member comprising a sintered material having an ?-Al2O3 crystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of Al2O3 and 2 to 30% by mass of Y in terms of Y2O3. The corrosion resistant member has a peak intensity ratio I116/I104 within the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein I116 and I104 represent peak intensities attributed to the (116) face and the (104) face, respectively, of an ?-Al2O3 crystal as measured by X-ray diffractometry on its surface layer.

Abstract: A support for capillaries comprises a ceramic member having a flat surface area on which the capillaries are to be aligned. The flat surface area has a flatness of not more than 0.02 mm and has a mean spacing of waviness motifs (AW) of not more than 100 ?m.

Abstract: A silicon nitride sintered material includes a silicon nitride crystal and a grain boundary layer that contains at least two of a first metal silicide (a metal silicide having, as a first metal element, at least one selected from the group consisting of Fe, Cr, Mn and Cu), a second metal silicide (a metal silicide having, as a second metal element, at least one of W or Mo) and a third metal silicide (a metal silicide having a plurality of metal elements including the first metal element and the second metal element), wherein the grain boundary layer has neighboring phase where at least two of the first through third metal silicides exist in contact with each other.

Abstract: The electromagnetic wave absorber of the present invention is made of a sintered body that contains Fe and at least one element selected from Si, Mg, Zr, Ni, Al and Co, and an attenuation of electromagnetic wave is 2 dB or more at frequencies of 10 GHz and higher so as to provide good electromagnetic wave absorbing characteristic with no corrosive gas generated at all, and is easy to manufacture. The electromagnetic wave absorber is used mainly as a component of a high-frequency circuit package.

Abstract: The dielectric porcelain of the present invention comprises a polycrystalline material of which a main component comprises oxides containing at least a rare earth element (Ln), Al, M (M represents Ca and/or Sr) and Ti as metal elements, wherein the thickness of a grain boundary layer is 20 nm or less, thereby achieving a high value of &egr;r, high Q factor and small absolute value of the temperature coefficient &tgr;f of resonant frequency in a high frequency region. Thus this dielectric porcelain is preferably used in dielectric resonators.