Abstract: The present invention provides an information processing apparatus comprising a generator configured to generate image information for causing a display unit to display, as display information, any one of: difference information corresponding to a difference between first information and second information; information indicating at least one of a height and an attitude of the substrate during the exposure process of each of the plurality of shot regions; and information indicating a measurement result obtained by measuring a surface position of the substrate for each of the plurality of shot regions.

Abstract: The present invention provides a control device that performs position control of a control target by giving a feedforward manipulated value to the control target, wherein the device obtains, for each of a plurality of positions at which the control target is to be arranged, a measurement result of a first output response of the control target obtained when giving a first manipulated value to the control target, determines a reference value of the first output response, based on the measurement results respectively obtained at the plurality of positions, determines a second manipulated value by arraying a plurality of first manipulated values in time-series based on a relationship between the first manipulated value and the reference value, and sets the feedforward manipulated value based on the second manipulated value.

Abstract: The present invention provides a control device that performs position control of a control target by giving a feedforward manipulated value to the control target, wherein the device obtains, for each of a plurality of positions at which the control target is to be arranged, a measurement result of a first output response of the control target obtained when giving a first manipulated value to the control target, determines a reference value of the first output response, based on the measurement results respectively obtained at the plurality of positions, determines a second manipulated value by arraying a plurality of first manipulated values in time-series based on a relationship between the first manipulated value and the reference value, and sets the feedforward manipulated value based on the second manipulated value.

Abstract: In an exposure method of performing a scan exposure of a substrate, held by a substrate stage, in a first direction for each shot region, a surface position of an exposure area is pre-measured before the exposure area reaches a region, to be irradiated with exposure light, of the substrate, movement of the substrate stage in order to change a shot region to undergo the scan exposure includes first movement in which the substrate stage moves along a curved trajectory, and second movement in which the substrate stage rectilinearly moves in the first direction, and, while the movement of the substrate stage is the first movement, the surface position is pre-measured, and a pre-measure position in a shot region is common among a plurality of shot regions.

Abstract: In an exposure method of performing a scan exposure of a substrate, held by a substrate stage, in a first direction for each shot region, a surface position of an exposure area is pre-measured before the exposure area reaches a region, to be irradiated with exposure light, of the substrate, movement of the substrate stage in order to change a shot region to undergo the scan exposure includes first movement in which the substrate stage moves along a curved trajectory, and second movement in which the substrate stage rectilinearly moves in the first direction, and, while the movement of the substrate stage is the first movement, the surface position is pre-measured, and a pre-measure position in a shot region is common among a plurality of shot regions.

Abstract: The present invention provides an apparatus including a calculating unit which calculates a first time serving as a time required to drive a stage in a non-scanning direction perpendicular to a scanning direction, and a second time serving as a time required to drive the stage in the scanning direction, both of which range from when exposure of one of the plurality of shot regions ends until exposure of the next shot region starts, and an adjusting unit which adjusts, when the first time is longer than the second time, one of a time for which an acceleration of the stage nonlinearly changes in the process of reversing the scanning direction, and a settling time taken for the stage to settle from when acceleration of the stage ends until exposure starts, so that the second time becomes longer than the first time in driving the stage in the scanning direction.

Abstract: The present invention provides an apparatus including a calculating unit which calculates a first time serving as a time required to drive a stage in a non-scanning direction perpendicular to a scanning direction, and a second time serving as a time required to drive the stage in the scanning direction, both of which range from when exposure of one of the plurality of shot regions ends until exposure of the next shot region starts, and an adjusting unit which adjusts, when the first time is longer than the second time, one of a time for which an acceleration of the stage nonlinearly changes in the process of reversing the scanning direction, and a settling time taken for the stage to settle from when acceleration of the stage ends until exposure starts, so that the second time becomes longer than the first time in driving the stage in the scanning direction.