Patents by Inventor Yoshihiro Sakaya

Yoshihiro Sakaya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering targets having life alarm function
    Patent number: 5487823
    Abstract: A sputtering target is provided in which a gas component source (material capable of evolving gas) is included in the bottom portion of the target. Predicting and determining the expiration of the useful life of sputtering targets is permitted more precisely and in a simpler way than heretofore described. Moreover over-sputtering is prevented with an improvement in target use efficiency.
    Type: Grant
    Filed: April 26, 1994
    Date of Patent: January 30, 1996
    Assignee: Japan Energy Corporation
    Inventors: Susumu Sawada, Junichi Anan, Hiroki Nakamura, Yoshihiro Sakaya