Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: Disclosed is a pressure sensor 1 for a vehicle including a sensing element 10 for measuring the pressure of brake fluids in fluid passages, a sensor housing 20 for accommodating the sensing element 10, and contact probes 30 that are electrically connected to the sensing element 10 and an electronic control unit 300 (control unit). Each contact probe 30 includes a sleeve 31, a coil spring 32 (elastic member) housed in the sleeve 31, the rod 33 inserted into the sleeve 31. The sleeve 31 is connected to the sensing element 10 in a state that the sleeve 31 is fixed in the sensor housing 20, and the rod 33 is pressed to the electronic unit 300 by pressing force of the coil spring 32.

Abstract: Disclosed is a pressure sensor 1 for a vehicle including a sensing element 10 for measuring the pressure of brake fluids in fluid passages, a sensor housing 20 for accommodating the sensing element 10, and contact probes 30 that are electrically connected to the sensing element 10 and an electronic control unit 300 (control unit). Each contact probe 30 includes a sleeve 31, a coil spring 32 (elastic member) housed in the sleeve 31, the rod 33 inserted into the sleeve 31. The sleeve 31 is connected to the sensing element 10 in a state that the sleeve 31 is fixed in the sensor housing 20, and the rod 33 is pressed to the electronic unit 300 by pressing force of the coil spring 32.

Abstract: A pressure sensor (1) has a circuit board (5) having a circuit portion (11) for amplifying an electric signal detected by a pressure detecting element (2C) and attached with an IC die (16), and a terminal (12) for inputting and outputting the electric signal from the circuit portion (11). The circuit portion (11) and the terminal (12) have a frame (11A, 12D) formed by a metal plate, the metal plate being provided with resin molds (14, 15). The circuit portion (11) and the terminal (12) are continuously formed, so that steps for soldering etc. is not necessary.

Abstract: A pressure sensor has a joint (1) having a pressure port (13), a pressure detecting device (2) bonded to the joint (1) to convert fluid pressure to an electric signal and a housing (5) provided to an output side of the pressure detecting device (2), the pressure sensor further including a flange member (3) bonded to the joint (1) and having a through-hole (26) for the pressure detecting device (2) to be inserted and a connector (6) bonded to the flange member (3) to fix the housing (5).

Abstract: A pressure sensor (1) has a circuit board (5) having a circuit portion (11) for amplifying an electric signal detected by a pressure detecting element (2C) and attached with an IC die (16), and a terminal (12) for inputting and outputting the electric signal from the circuit portion (11). The circuit portion (11) and the terminal (12) have a frame (11A, 12D) formed by a metal plate, the metal plate being provided with resin molds (14, 15). The circuit portion (11) and the terminal (12) are continuously formed, so that steps for soldering etc. is not necessary.

Abstract: A pressure sensor has a joint (1) having a pressure port (13), a pressure detecting device (2) bonded to the joint (1) to convert fluid pressure to an electric signal and a housing (5) provided to an output side of the pressure detecting device (2), the pressure sensor further including a flange member (3) bonded to the joint (1) and having a through-hole (26) for the pressure detecting device (2) to be inserted and a connector (6) bonded to the flange member (3) to fix the housing (5).