Abstract: A minute ball array apparatus includes: an array jig including insert parts, into which minute balls are to be inserted, and which are formed in a predetermined pattern; a ball moving unit, which comprises a thrust surface, and which moves the thrust surface along an upper surface of the array jig so as to move the minute balls supplied onto the upper surface of the array jig to drop the minute balls into the insert parts of the array jig; a collapsing member, which is provided in a vicinity of the thrust surface, and which collapses a buildup of the minute balls rising along the thrust surface when the thrust surface is moved by the ball moving unit; and a motion imparting unit that imparts the collapse member with motion for collapsing the rising buildup of the minute balls.

Abstract: A ball array mask includes: a metal mask, which includes through holes into which minute balls are inserted, and which is positioned at a location above an object to be mounted; a hollow frame; a stretchable sheet, edges of the metal mask being affixed to the hollow frame by the stretchable sheet; and projection members that are attached to respective corners of the metal mask so as to pull the metal mask outwardly.

Abstract: There is provided a bonding apparatus for holding a semiconductor chip by using a bonding head and bonding the semiconductor chip onto a substrate. The bonding head includes: a holding part for holding the semiconductor chip; gas exhausting means for surrounding the holding part and exhausting gas toward the holding part; and an elevator means for lifting down/up the gas exhausting means to a lift-down state, in which at least a portion of the gas exhausting means protrudes downward from the bottom face of the holding part, and a lift-up state, in which any portion of the gas exhausting means does not protrude downward from the bottom face of the holding part. When the bonding apparatus holds and conveys the semiconductor chip by using the bonding head, the bonding apparatus brings the gas exhausting means to the lift-down state and exhausts the gas toward the semiconductor chip.

Abstract: A bonding apparatus includes: a bonding head having a bonding tool for sucking and holding an electronic part; elevator means lifting up/down the bonding head; a stopper provided to the bonding head; a stopper support that regulates a descending height of the bonding head with engagement with the stopper; distance detection means that detects a distance between the stopper and the stopper support; stopper support elevator means that lifts up/down the stopper support independently from the bonding head; and control means that controls the stopper support elevator means. The control means controls a height of the stopper support so as to keep the distance between the stopper and the stopper support at a predetermined distance by using a signal from the distance detection means until the bump is melted in heating and pressing the electronic part to the substrate.

Abstract: There is provided a bonding apparatus for holding a semiconductor chip by using a bonding head and bonding the semiconductor chip onto a substrate. The bonding head includes: a holding part for holding the semiconductor chip; gas exhausting means for surrounding the holding part and exhausting gas toward the holding part; and an elevator means for lifting down/up the gas exhausting means to a lift-down state, in which at least a portion of the gas exhausting means protrudes downward from the bottom face of the holding part, and a lift-up state, in which any portion of the gas exhausting means does not protrude downward from the bottom face of the holding part. When the bonding apparatus holds and conveys the semiconductor chip by using the bonding head, the bonding apparatus brings the gas exhausting means to the lift-down state and exhausts the gas toward the semiconductor chip.

Abstract: A minute ball array apparatus includes: an array jig including insert parts, into which minute balls are to be inserted, and which are formed in a predetermined pattern; a ball moving unit, which comprises a thrust surface, and which moves the thrust surface along an upper surface of the array jig so as to move the minute balls supplied onto the upper surface of the array jig to drop the minute balls into the insert parts of the array jig; a collapsing member, which is provided in a vicinity of the thrust surface, and which collapses a buildup of the minute balls rising along the thrust surface when the thrust surface is moved by the ball moving unit; and a motion imparting unit that imparts the collapse member with motion for collapsing the rising buildup of the minute balls.

Abstract: A ball array mask includes: a metal mask, which includes through holes into which minute balls are inserted, and which is positioned at a location above an object to be mounted; a hollow frame; a stretchable sheet, edges of the metal mask being affixed to the hollow frame by the stretchable sheet; and projection members that are attached to respective corners of the metal mask so as to pull the metal mask outwardly.

Abstract: A conductive ball mounting apparatus and method for holding a conductive ball on the holding face, as has a suction port formed therein, of a holder head thereby to mount the held conductive ball, while interposing a flux therein, on a workpiece. After the end of the mounting action and before a next conductive ball is held, flux removing means for removing the flux adhered to the holding face is brought into abutment against the holding face of the holder head thereby to remove the flux from holding face.

Abstract: A conductive ball arraying apparatus includes an arraying jig including conductive ball insertion parts in a predetermined array pattern, a ball cup that has an opening formed in a bottom surface thereof and is capable of housing a plurality of conductive balls along with the arraying jig, moving means that moves the arraying jig and the ball cup relatively, the moving means moving the ball cup relatively along a top surface of the arraying jig and dropping off the conductive balls into the ball insertion parts of the arraying jig, floating means that floats the ball cup from the arraying jig, and vibrating means that vibrates the ball cup. The moving means moves the ball cup relatively along the top surface of the arraying jig while floating the ball cup from the arraying jig and vibrating the ball cup.

Abstract: A conductive ball arraying apparatus includes an arraying jig including conductive ball insertion parts in a predetermined array pattern, a ball cup that has an opening formed in a bottom surface thereof and is capable of housing a plurality of conductive balls along with the arraying jig, moving means that moves the arraying jig and the ball cup relatively, the moving means moving the ball cup relatively along a top surface of the arraying jig and dropping off the conductive balls into the ball insertion parts of the arraying jig, floating means that floats the ball cup from the arraying jig, and vibrating means that vibrates the ball cup. The moving means moves the ball cup relatively along the top surface of the arraying jig while floating the ball cup from the arraying jig and vibrating the ball cup.

Abstract: A conductive ball mounting apparatus and method for holding a conductive ball on the holding face, as has a suction port formed therein, of a holder head thereby to mount the held conductive ball, while interposing a flux therein, on a workpiece. After the end of the mounting action and before a next conductive ball is held, flux removing means for removing the flux adhered to the holding face is brought into abutment against the holding face of the holder head thereby to remove the flux from holding face.

Abstract: A plurality of BGA packages are formed in a work, and alignment marks are put at least on the top and rearmost ones of the BGA packages. The top BGA package is stopped in an image pick-up area, and an alignment mark image and a ball image are picked up while relative movement between the work and a camera is started. Ball images of the second and the following BGA packages are picked up while the relative movement between the camera and the work is continued, the relative movement is stopped when a ball image of the last BGA package is picked up, and an alignment mark image of the rearmost BGA package is picked up after the relative movement is stopped. The positions of balls are calculated while the posture of the work as a whole is taken into consideration, and judgment is made as to whether the positions of balls are good or bad.

Abstract: In a ball mount apparatus for mounting balls on a work by means of a mount head, the work is disposed under the mount head and the mount head is provided with a Z-axis driving mechanism for driving the mount head only in an up/down direction. A ball tray for storing the balls is disposed at a height between the mount head and the work and provided with a driving mechanism for reciprocating between a ball sucking position under the mount head and a stand by position.

Abstract: A solder ball mounting device for mounting solder balls on a workpiece is disclosed. A solder ball supplying section in which the solder balls are stored; a sucking head having a plurality of solder ball sucking holes in a lower surface thereof; sucking means coupled to the sucking head so as to suck the solder balls in the solder ball sucking holes; lift means for vertically moving the sucking head; and pressure adjusting means for adjusting and setting degree of vacuum in the sucking head to a first pressure for sucking the solder balls, and to a second pressure which is lower in the degree of vacuum than the first pressure and is high enough to hold the solder balls sucked, are provided.

Abstract: In a ball mount apparatus for mounting balls on a work by means of a mount head, the work is disposed under the mount head and the mount head is provided with a Z-axis driving mechanism for driving the mount head only in an up/down direction. A ball tray for storing the balls is disposed at a height between the mount head and the work and provided with a driving mechanism for reciprocating between a ball sucking position under the mount head and a stand by position.

Abstract: A unit for supplying solder balls or the like is configured to have a primary hopper for storing a number of solder balls or the like, a ball tray for storing solder balls or the like, and a ball supply path connecting the primary hopper and the ball tray. A secondary hopper connected to the primary hopper through the ball supply path is provided near the ball tray. A vibration member is added to the secondary hopper, so that solder balls or the like are supplied to the ball tray by vibration.