Patents by Inventor Yoshihisa Kumagai

Yoshihisa Kumagai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Assembling apparatus and assembling method for semiconductor manufacturing apparatus
    Patent number: 11114318
    Abstract: Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: September 7, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Hisashi Inoue, Masahiro Kobayashi, Michihiro Takahashi, Tamotsu Hatakeyama, Harunari Hasegawa, Hiroshi Kikuchi, Yoshihisa Kumagai
  • ASSEMBLING APPARATUS AND ASSEMBLING METHOD FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20190333789
    Abstract: Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.
    Type: Application
    Filed: April 25, 2019
    Publication date: October 31, 2019
    Inventors: Hisashi Inoue, Masahiro Kobayashi, Michihiro Takahashi, Tamotsu Hatakeyama, Harunari Hasegawa, Hiroshi Kikuchi, Yoshihisa Kumagai
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    Patent number: D923902
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: June 29, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Masahiro Kobayashi, Michihiro Takahashi, Harunari Hasegawa, Yoshihisa Kumagai
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    Patent number: D932725
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: October 5, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Masahiro Kobayashi, Michihiro Takahashi, Harunari Hasegawa, Yoshihisa Kumagai
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    Patent number: D937526
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: November 30, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Masahiro Kobayashi, Michihiro Takahashi, Harunari Hasegawa, Yoshihisa Kumagai