Patents by Inventor Yoshihisa ORAI

Yoshihisa ORAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus and control method thereof
    Patent number: 10784074
    Abstract: The invention is directed to a charged particle beam apparatus that enables temperature maintenance in a cooling unit provided inside a vacuum application apparatus using a refrigerant. The charged particle beam apparatus includes a cooling tank that contains a refrigerant for cooling a cooling unit, a cooling pipe that supplies the refrigerant from the cooling tank to the cooling unit, and a unit that leads the refrigerant to liquefy when the refrigerant is biased to a solid.
    Type: Grant
    Filed: November 29, 2016
    Date of Patent: September 22, 2020
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Takeshi Sunaoshi, Yoshihisa Orai, Haruhiko Hatano, Takashi Mizuo
  • CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
    Publication number: 20180350554
    Abstract: The invention is directed to a charged particle beam apparatus that enables temperature maintenance in a cooling unit provided inside a vacuum application apparatus using a refrigerant. The charged particle beam apparatus includes a cooling tank that contains a refrigerant for cooling a cooling unit, a cooling pipe that supplies the refrigerant from the cooling tank to the cooling unit, and a unit that leads the refrigerant to liquefy when the refrigerant is biased to a solid.
    Type: Application
    Filed: November 29, 2016
    Publication date: December 6, 2018
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Takeshi SUNAOSHI, Yoshihisa ORAI, Haruhiko HATANO, Takashi MIZUO