Abstract: To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate. The water/oil repellent layer-provided substrate comprises a substrate, an undercoat layer and a water/oil repellent layer in this order. The water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group, the undercoat layer contains an oxide contains silicon and at least one element of boron and phosphorus, and a ratio of the total molar concentration of boron and phosphorus in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.003 to 9.

Abstract: To provide a water/oil repellent layer-provided substrate having improved long-term reliability of abrasion resistance, and a method for producing it. A water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer formed on the surface of the substrate, and a water/oil repellent layer formed on the surface of the undercoat layer, in this order, wherein the alkali deficiency index is higher than 0.0, as determined by a depth profile obtained by X-ray photoelectron spectroscopy (XPS) by C60 ion sputtering from the side of the surface of the water/oil repellent layer, taking the total concentration of fluorine, silicon, aluminum, alkali metal elements and oxygen as 100 at %.

Abstract: To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate. The water/oil repellent layer-provided substrate of the present invention is a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil repellent layer in this order, wherein the water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group, the undercoat layer contains an oxide containing silicon and an alkaline earth metal element, and the ratio of the molar concentration of the alkaline earth metal element in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.005 to 5.

Abstract: To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate. The water/oil repellent layer-provided substrate of the present invention is a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil repellent layer in this order, wherein the water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group, the undercoat layer contains an oxide containing silicon and at least one element selected from the group consisting of titanium, zirconium and aluminum, and the ratio of the total molar concentration of titanium, zirconium and aluminum in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.03 to 0.7.

Abstract: To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate. The water/oil repellent layer-provided substrate of the present invention is a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil repellent layer in this order, wherein the water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group, the undercoat layer contains an oxide containing silicon and at least one element of boron and phosphorus, and the ratio of the total molar concentration of boron and phosphorus in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.003 to 9.