Patents by Inventor Yoshihumi Tsutai

Yoshihumi Tsutai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multilayer structural body and method for cleaning the same
    Publication number: 20090133713
    Abstract: It has been difficult to provide a large-sized ceramic member quickly and economically. A multilayer structure is produced by forming a ceramic film on a base which is made of a material that can be shaped comparatively easily. The ceramic film is formed by a plasma spraying method, CVD method, PVD method, sol-gel method or the like. Alternatively, the ceramic film may be formed by a method combined with a spray deposit film.
    Type: Application
    Filed: July 12, 2006
    Publication date: May 28, 2009
    Inventors: Tadahiro Ohmi, Akinobu Teramoto, Hitoshi Morinaga, Yukio Kishi, Hiromichi Ohtaki, Yoshihumi Tsutai
  • Member for a Plasma Processing Apparatus and Method of Manufacturing the Same
    Publication number: 20090101070
    Abstract: A member for a plasma processing apparatus, which is excellent in film-formability, durability, and reliability, is provided. On a substrate, a ceramic film having a purity not less than 98% is provided. In the ceramic film, grains constituting the film have a grain diameter not greater than 50 nm and the amount of moisture released from the film is not more than 1019 molecules/cm2.
    Type: Application
    Filed: February 20, 2007
    Publication date: April 23, 2009
    Inventors: Tadahiro Ohmi, Masafumi Kitano, Yoshihumi Tsutai, Keisuke Satou, Mabito Iguchi