Patents by Inventor Yoshiichi Hori

Yoshiichi Hori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the inspection of patterns
    Patent number: 5173719
    Abstract: The present invention relates to a technique, in the inspection of a defect of a semiconductor memory or the like, in which chip comparison is separated from repetitive pattern comparison in a region of a wafer to be inspected whereby both the comparisons are rendered possible to perform in parallel in one and the same scanning.
    Type: Grant
    Filed: December 19, 1990
    Date of Patent: December 22, 1992
    Assignees: Hitachi, Ltd., Hitachi Tokyo Electronics Co., Ltd.
    Inventors: Yuzo Taniguchi, Tooru Fukui, Mikihito Saito, Yoshiichi Hori, Takahiro Kamagata