Abstract: Embodiments of the inventive concept can extract digital document information related with a specific individual to achieve a work load reduction associated with evidentiary material preparation for litigation. A specific individual is selected from at least one individual included in user information. Only digital document information which was accessed by the specific individual is extracted based on access history information regarding the selected specific individual. Additional information indicating whether or not document files in the extracted digital document information are each related with the litigation is set, and a document file related with the litigation is outputted based on the additional information.

Abstract: Embodiments of the inventive concept can extract digital document information related with a specific individual to achieve a work load reduction associated with evidentiary material preparation for litigation. Recorded digital information can be displayed and user-specifying information can be set for each of a plurality of document files. The user-specifying information shows which user contained in user information one or more document files is related with. A recording unit can record the set user-specifying information. At least one user is selected, and a document file where user-specifying information which corresponds to the selected user was set is searched. Additional information showing whether or not the searched document file is related with the litigation is set via a display unit. A document file which is related with litigation is outputted based on the additional information.

Abstract: A liquid level sensor 18 has sensor probes 20a to 21b, and a monitor unit 23. The monitor unit 23 has a probe potential difference detecting section 25 for detecting the output potential difference between sensor probes 20a, 20b, and the output potential difference between sensor probes 21a, 21b; and a liquid level determining section 26 for determining the level of the liquid from the result of detection. The monitor unit 23 has a bubbling detection pulse generator section 28 for detecting an occurrence of bubbling of a bubbling gas from the result of detection by the probe potential difference detecting section 25 and generating a pulse signal, and a pulse counter 29 for counting the number of pulses generated by the bubbling detection pulse generator section 28, thereby making it possible to grasp the number of bubbling periods of the bubbling gas.

Abstract: A liquid level sensor 18 has sensor probes 20a to 21b, and a monitor unit 23. The monitor unit 23 has a probe potential difference detecting section 25 for detecting the output potential difference between sensor probes 20a, 20b, and the output potential difference between sensor probes 21a, 21b; and a liquid level determining section 26 for determining the level of the liquid from the result of detection. The monitor unit 23 has a bubbling detection pulse generator section 28 for detecting an occurrence of bubbling of a bubbling gas from the result of detection by the probe potential difference detecting section 25 and generating a pulse signal, and a pulse counter 29 for counting the number of pulses generated by the bubbling detection pulse generator section 28, thereby making it possible to grasp the number of bubbling periods of the bubbling gas.

Abstract: A cleaning method for a CVD apparatus which forms films on wafers by introducing film forming gas into a chamber by means of a shower head. In this method, the NF3 gas, which forms the cleaning gas including a compound containing fluorine atoms, is activated by exposure to microwaves by a microwave generating source, and then introduced into the chamber. The temperature of the lid section is raised by heating the lid section by means of a heater plate, or halting supply of cooling water to the lid section from the water supply source, whereby the temperature of the shower head during cleaning is raised above the temperature at which film formation onto the wafer is performed.