Abstract: Provided is a Cu-based alloy powder that is suitable for a process involving rapid melting and rapid solidification and that can provide a shaped object superior in characteristics. The powder is composed of a Cu-based alloy, which contains an element M being one or more elements selected from Cr, Fe, Ni, Zr, and Nb: 0.1% by mass or more and 10.0% by mass or less, Si: more than 0% by mass and 0.20% by mass or less, P: more than 0% by mass and 0.10% by mass or less, and S: more than 0% by mass and 0.10% by mass or less, the balance being Cu and inevitable impurities. This powder has a ratio (D50/TD) of the average particle diameter D50 (?m) thereof to the tap density TD (Mg/m3) is 0.2×10?5·m4/Mg or more and 20×10?5·m4/Mg or less, and has a sphericity of 0.80 or more and 0.95 or less.

Abstract: Provided is a Cu-based alloy powder that is suitable for a process involving rapid melting and rapid solidification and that can provide a shaped object superior in characteristics. The powder is composed of a Cu-based alloy, which contains an element M being one or more elements selected from Cr, Fe, Ni, Zr, and Nb: 0.1% by mass or more and 10.0% by mass or less, Si: more than 0% by mass and 0.20% by mass or less, P: more than 0% by mass and 0.10% by mass or less, and S: more than 0% by mass and 0.10% by mass or less, the balance being Cu and inevitable impurities. This powder has a ratio (D50/TD) of the average particle diameter D50 (?m) thereof to the tap density TD (Mg/m3) is 0.2×10?5·m4/Mg or more and 20×10?5·m4/Mg or less, and has a sphericity of 0.80 or more and 0.95 or less.

Abstract: A (CoFe)Zr/Nb/Ta/Hf based target material is provided which is capable of achieving a high sputtering efficiency and a high sputtering effect by increasing the leakage magnetic flux in the magnetron sputtering, and a method for producing the target material. This target material is made of an Fe—Co based alloy comprising not less than 80 atomic % in total of Fe and Co having an Fe:Co atomic ratio of 80:20 to 0:100, and less than 20 atomic % of one or more selected from the group consisting of Zr, Hf, Nb and Ta. The Fe—Co based alloy comprises a Co—Fe phase being a ferromagnetic phase, and the one or more selected from the group consisting of Zr, Hf, Nb and Ta are incorporated in solid solution form into the Co—Fe phase in a total amount of 0.5 to 2 atomic %.

Abstract: A soft-magnetic FeCo based target material is provided which has a high saturation magnetic flux density and superior atmospheric corrosion resistance. The target material is a soft-magnetic FeCo based target material made of an FeCo based alloy. The FeCo based alloy comprises 0 to 30 at. % of one or more metal elements selected from the group consisting of B, Nb, Zr, Ta, Hf, Ti and V; and the balance being Fe and Co with unavoidable impurities. The Fe:Co atomic ratio ranges from 10:90 to 70:30. The FeCo based alloy may further comprise 0.2 at. % to 5.0 at. % of Al and/or Cr.

Abstract: A (CoFe)ZrNb/Ta/Hf based target material is provided which is capable of achieving a high sputtering efficiency and a high sputtering effect by increasing the leakage magnetic flux in the magnetron sputtering, and a method for producing the target material. This target material is made of an Fe—Co based alloy comprising not less than 80 atomic % in total of Fe and Co having an Fe:Co atomic ratio of 80:20 to 0:100, and less than 20 atomic % of one or more selected from the group consisting of Zr, Hf, Nb and Ta. The Fe—Co based alloy comprises a Co—Fe phase being a ferromagnetic phase, and the one or more selected from the group consisting of Zr, Hf, Nb and Ta are solid-solved into the Co—Fe phase in a total amount of 0.5 to 2 atomic %.

Abstract: A soft-magnetic FeCo based target material is provided which has a high saturation magnetic flux density and superior atmospheric corrosion resistance. The target material is a soft-magnetic FeCo based target material made of an FeCo based alloy. The FeCo based alloy comprises 0 to 30 at. % of one or more metal elements selected from the group consisting of B, Nb, Zr, Ta, Hf, Ti and V; and the balance being Fe and Co with unavoidable impurities. The Fe:Co atomic ratio ranges from 10:90 to 70:30. The FeCo based alloy may further comprise 0.2 at. % to 5.0 at. % of Al and/or Cr.

Abstract: There is disclosed a method for producing a Fe—Co based target material for forming a soft magnetic thin-film. This method comprises the steps of: preparing a first raw-material powder having an Fe:Co weight ratio ranging from 8:2 to 7:3 and a second raw-material powder having an Fe—Co weight ratio ranging from 2:8 to 0:10; mixing the first raw-material powder and the second raw-material powder together to obtain a powder mixture having an Fe:Co weight ratio ranging from 8:2 to 2:8; and applying a pressure of not less than 100 MPa to the powder mixture at a temperature ranging from 1073 to 1473 K for consolidation. At least one additional element selected from the group consisting of Nb, Zr, Ta and Hf is added to either one or both of the first and second raw-material powders in a total amount of 3 to 15 atom % with respect to the total amount of the powder mixture. The Fe—Co based target material thus produced has a high density, while having a magnetic permeability lower than the conventional one.

Abstract: The process fault analyzer includes a process data editing part for extracting a process characteristic quantity from process data in a time series stored in a process data storing part, a fault analysis rule data storing part for storing a fault analysis rule for performing fault detection on a product manufactured in a manufacturing system and on manufacturing equipment, based on the process characteristic quantity, and a fault determining part for determining existence/absence of a fault in a product and in manufacturing equipment based on the process characteristic quantity. A partial least square regression (PLS) model is used as an estimation model used for the fault analysis rule. Also, Q statistics and T2 statistics are used, and the fault determining part determines a fault in manufacturing equipment when values of the statistics are the same as set value or more.

Abstract: There is disclosed a soft magnetic target material with an improved atmospheric resistance without deterioration of magnetic properties. A soft magnetic target material according to the first aspect comprises a Fe—Co based alloy having a Fe:Co atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In addition, a soft magnetic target material according to the second aspect comprises a Fe—Ni based alloy having a Fe:Ni atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In the soft magnetic target materials according to the first and second aspects, the alloys further comprise one or more selected from a group consisting of B, Nb, Zr, Ta, Hf, Ti and V of not more than 30 atom %.

Abstract: A process fault analyzer, capable of analyzing fault caused due to a process performed by a plurality of process equipments, is provided. The analyzer includes: a plurality of process data storing units which store process data of the respective process equipments; a process data editing unit which calculates process characteristic quantity from various kinds of process data stored on the process data storing units; a plurality of process characteristic quantity data storing units which store process characteristic quantity of the respective process equipments calculated by the process data editing unit; a process characteristic quantity integration unit which accesses the process characteristic quantity data storing units, extracts process characteristic quantity of the same wafer, and integrates them; and a fault determination unit which determines presence or absence of fault according to the integrated process characteristic quantity data integrated by the process characteristic quantity integration unit.

Abstract: A process fault analysis apparatus according to the present invention includes a process data editing unit which extracts process features from process data stored in a process data storage unit and stores the process features in a process feature data storage unit, a fault analysis rule data storage unit in which a fault analysis rule for performing fault detection and fault factor analysis from the process features is stored, a fault judgment unit which performs fault detection and fault factor analysis from the process features using the fault analysis rule, and a unit which outputs fault notification information when the fault judgment unit judges that the fault is generated. In the fault factor analysis, a contribution ratio indicating which process feature has how much influence on the fault is determined, and the process feature having the higher contribution ratio is set at the fault factor.

Abstract: A model generating apparatus includes: a first input device for inputting process state information; a second input device for inputting test result information; a characteristic quantity extracting device for extracting a process characteristic quantity from the process state information in each of the areas; and an analyzing device for generating a process-quality model by executing an analysis of data mining using the process characteristic quantity and the test result information associated with each other. The model generating apparatus further includes: a third input device for inputting process position information so that the process position information can be associated with the process state information; and a fourth input device for inputting test position information so that the test position information can be associated with test result information.

Abstract: A model creating device inputs process status data that are obtained in time series during a period during which each of process steps of a process is carried out and are related to status of this process, as well as inspection result data related to object articles that were processed by said process. An extracting part extracts a characteristic quantity from the process status data for every unit object article and for every process step. An analyzing part carries out an analysis by data mining by using the characteristic quantities and inspection result data in correlation with the unit object articles and creates a process-quality model that shows a relationship between the correlated characteristic quantities and inspection result data.