Abstract: There is provided a movement mechanism including a Z spindle the posture of which is hardly changed when the Z spindle is moved upward and downward, and having less measurement errors due to hysteresis. A movement mechanism includes a Z-axis movement mechanism and an X-axis movement mechanism that moves the Z-axis movement mechanism in the horizontal direction. The Z-axis movement mechanism includes a Z spindle having a length in the vertical direction and a Z-axis drive unit that moves the Z spindle in the vertical direction. The Z-axis drive unit includes an open belt having an upper end fixed near an upper end portion of the Z spindle, and a lower end fixed to near a lower end portion of the Z spindle, a drive pulley around which the open belt wounded and that feeds and drives the open belt upward and downward, an upper tension roller that pushes the open belt against the Z spindle, and a lower tension roller that pushes the open belt against the Z spindle.

Abstract: A lifting drive device for a Z-axis spindle inserted into a guide tube and guided via an air layer including: a wire extending upward from the inside of the Z-axis spindle and having its upper end supported by the guide tube, a piston connected to an lower end of the wire, a cylinder that moves up-and-down relative to the piston by an air supplied to a cylinder chamber provided to the Z-axis spindle and partitioned by the piston, a driving roller provided to the guide tube and in contact with the surface of the Z-axis spindle, and a motor for driving the driving roller, so as to achieve highly precise linear movement and swift lifting of the Z-axis spindle guided by an air bearing and to be suitable for structural simplification, weight reduction and vibration countermeasures.

Abstract: A coordinate measuring machine includes: a table and a column which are configured to relatively move in a predetermined moving direction; a guide surface formed on the table and having a guide region and a drive region extending in the moving direction in parallel to each other; at least one air pad formed to the column and facing the guide region; and a drive roller formed to the column and rolling on the drive region.

Abstract: There is provided a movement mechanism including a Z spindle the posture of which is hardly changed when the Z spindle is moved upward and downward, and having less measurement errors due to hysteresis. A movement mechanism includes a Z-axis movement mechanism and an X-axis movement mechanism that moves the Z-axis movement mechanism in the horizontal direction. The Z-axis movement mechanism includes a Z spindle having a length in the vertical direction and a Z-axis drive unit that moves the Z spindle in the vertical direction. The Z-axis drive unit includes an open belt having an upper end fixed near an upper end portion of the Z spindle, and a lower end fixed to near a lower end portion of the Z spindle, a drive pulley around which the open belt wounded and that feeds and drives the open belt upward and downward, an upper tension roller that pushes the open belt against the Z spindle, and a lower tension roller that pushes the open belt against the Z spindle.

Abstract: A probe head rotation mechanism, situated between a spindle and a probe of a coordinate measurement device, includes: a main body frame supported by the spindle; a rotor supported by the main body frame so as to be capable of tilting with respect to an axial center of the spindle; the main body frame; and a motor supported by the main body frame and driving the rotor. A motor main body is arranged away from lying on the axial center of the spindle, and an axial center of the motor is oriented outward in a diameter direction of the spindle.

Abstract: A lifting drive device for a Z-axis spindle inserted into a guide tube and guided via an air layer including: a wire extending upward from the inside of the Z-axis spindle and having its upper end supported by the guide tube, a piston connected to an lower end of the wire, a cylinder that moves up-and-down relative to the piston by an air supplied to a cylinder chamber provided to the Z-axis spindle and partitioned by the piston, a driving roller provided to the guide tube and in contact with the surface of the Z-axis spindle, and a motor for driving the driving roller, so as to achieve highly precise linear movement and swift lifting of the Z-axis spindle guided by an air bearing and to be suitable for structural simplification, weight reduction and vibration countermeasures.

Abstract: A coordinate measuring machine includes: a table and a column which are configured to relatively move in a predetermined moving direction; a guide surface formed on the table and having a guide region and a drive region extending in the moving direction in parallel to each other; at least one air pad formed to the column and facing the guide region; and a drive roller formed to the column and rolling on the drive region.

Abstract: A probe head rotation mechanism, situated between a spindle and a probe of a coordinate measurement device, includes: a main body frame supported by the spindle; a rotor supported by the main body frame so as to be capable of tilting with respect to an axial center of the spindle; the main body frame; and a motor supported by the main body frame and driving the rotor. A motor main body is arranged away from lying on the axial center of the spindle, and an axial center of the motor is oriented outward in a diameter direction of the spindle.

Abstract: A scale for an apparatus for measuring displacement is enclosed. It comprises a scale member having a plurality of rectangular gratings arranged in a periodic pattern on the glass epoxy substrate and the like, a coating layer covered on the side of the scale member on which a plural of the rectangular gratings are formed, a scale cover (film layer) which functions as a protective layer, and a scale forming material bonded to the outer portion of the coating layer by an adhesive layer so as to keep contaminants, oil or particles from intruding between the rectangular grating and the adhesive layer, for example an adhesive tape and the like.

Abstract: A scale on an apparatus for measuring displacement is enclosed which comprises a scale member having a plural of rectangular gratings arranged with periodic pattern on the glass epoxy substrate and the like, a coating layer covered on the side of the scale member which a plural of the rectangular gratings are formed, a scale cover (film layer) which functions as a protective layer and a scale forming material bonded to the outer portion of the coating layer through an adhesive layer so as to keep contaminant, oil or particles from intruding between the rectangular grating and the adhesive layer such as an adhesive tape and the like.