Abstract: A high frequency power device includes a first oscillator outputting a first oscillating signal oscillated by a first predetermined frequency and a second oscillator outputting a second oscillating signal oscillated by a second predetermined frequency. A phase adjuster adjusts the phase of the second oscillating signal and a modulation index adjuster adjusts a modulation index of the second oscillating signal. A modulator outputs a modulated signal obtained by modulating, in frequency, the first oscillating signal by the phase adjusted and modulated second oscillating signal, and a high frequency output unit amplifies and outputs the modulated signal outputted from the modulator.

Abstract: The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value.

Abstract: A high frequency power device for supplying high frequency power to a load to generate plasma, includes: a high frequency detector, detecting a forward wave voltage and a reflected wave voltage in an output end of the high frequency power device to output a forward wave signal corresponding to the forward wave voltage and a reflected wave signal corresponding to the reflected wave voltage; a first oscillator, outputting a signal oscillated by a first predetermined frequency as a first oscillating signal; a second oscillator, outputting a signal oscillated by a frequency within a second predetermined frequency band as a second oscillating signal; a phase adjuster, adjusting a phase of the second oscillating signal outputted from the second oscillator; a modulation index adjuster, adjusting a modulation index of the second oscillating signal outputted from the second oscillator; a modulator, outputting a modulated signal obtained by modulating, in frequency, the first oscillating signal by the second oscillatin

Abstract: The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value.

Abstract: The microwave generator with use of a magnetron comprises a microwave detector for detecting microwave output from the magnetron and a filament life diagnostic circuit for judging the life of filament of the magnetron by decreasing an input power to a filament of the magnetron from a normal state of the magnetron while monitoring the microwave output from the magnetron by the microwave detector, comparing the input power in the normal state of the magnetron with that just before the magnetron becomes unstable and judging the filament life based on the difference between the input power of the normal state and that just before the unstable state.

Abstract: In a microwave generator apparatus including a magnetron having a filament and an anode and generating a microwave, a filament power source supplies a filament power to the filament of the magnetron, and an anode power source applies an anode voltage between the filament and the anode of the magnetron. Then a parasitic oscillation detecting circuit detects a parasitic oscillation voltage superimposed on the microwave generated by the magnetron, and a filament power controller, in response to the parasitic oscillation voltage detected by the parasitic oscillation detecting circuit, controls the filament power source to control the filament power so that the parasitic oscillation voltage is made smaller.