Patents by Inventor Yoshiki FUSE

Yoshiki FUSE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEANING METHOD, SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    Publication number: 20230138006
    Abstract: Provided is a cleaning method in a plasma processing apparatus for substrates. This cleaning method comprises: (a) forming a plasma in a chamber of the plasma processing apparatus while a substrate is not being held in place by an electrostatic chuck in the chamber; and (b) supplying voltage to the electrostatic chuck to reduce the charge on the surface of the electrostatic chuck while plasma is being formed in (a).
    Type: Application
    Filed: November 1, 2022
    Publication date: May 4, 2023
    Inventors: Yusuke AOKI, Shun ITOH, Yoshiki FUSE