Patents by Inventor Yoshiki Inuzuka

Yoshiki Inuzuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus and exposure method
    Patent number: 9513567
    Abstract: To provide a mask aligner that can appropriately manage very small-quantity production and multiproduct production. The present invention is a mask aligner 1 that exposes a wafer W in a predetermined size through a mask M, and has a configuration that includes: a conveying device 5 for conveying the wafer W and the mask M; an exposure stage 3f on which the wafer W conveyed by the conveying device 5 is installed; a mask holder 3b that is mounted to face the exposure stage 3f and on which the mask M conveyed by the conveying device 5 is installed; and an LED light source 8c mounted to face the exposure stage 3f via the mask holder 3b.
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: December 6, 2016
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Shiro Hara, Sommawan Khumpuang, Yoshiki Inuzuka, Yasuaki Yokoyama
  • Exposure Apparatus and Exposure Method
    Publication number: 20140320840
    Abstract: To provide a mask aligner that can appropriately manage very small-quantity production and multiproduct production. The present invention is a mask aligner 1 that exposes a wafer W in a predetermined size through a mask M, and has a configuration that includes: a conveying device 5 for conveying the wafer W and the mask M; an exposure stage 3f on which the wafer W conveyed by the conveying device 5 is installed; a mask holder 3b that is mounted to face the exposure stage 3f and on which the mask M conveyed by the conveying device 5 is installed; and an LED light source 8c mounted to face the exposure stage 3f via the mask holder 3b.
    Type: Application
    Filed: December 4, 2012
    Publication date: October 30, 2014
    Applicant: National Institute of Advanced Industrial Science and Technology
    Inventors: Shiro Hara, Sommawan Khumpuang, Yoshiki Inuzuka, Yasuaki Yokoyama