Patents by Inventor Yoshiki ISO

Yoshiki ISO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILM FORMATION APPARATUS
    Publication number: 20220145441
    Abstract: The invention provides a film formation apparatus that includes: a transfer unit that transfers a substrate; a film formation unit that forms an electrolyte film on a film formation region of the substrate transferred by the transfer unit; and an extraneous-material removal unit that comes into contact with the electrolyte film of the substrate transferred by the transfer unit after film formation of the film formation unit and thereby removes extraneous materials contained in the film formation region.
    Type: Application
    Filed: December 22, 2020
    Publication date: May 12, 2022
    Applicant: ULVAC, Inc.
    Inventors: Manabu GIBO, Takayoshi HIRONO, Yoshiki ISO