Abstract: A probe array in which probes are arranged on a cup-shaped acoustic wave detector at high density. In the probe array, transducers (acoustic wave conversion elements) configured to be capable of conversion between acoustic waves and an electrical signal are provided on a support member (housing).

Abstract: A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through radiation in a non-contact manner.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.

Abstract: Disclosed is a mirror holding system by which aberration resulting from deformation or positional deviation of an optical member, causing degradation of imaging performance, can be reduced whereby a desired optical performance is assured. Also disclosed is an exposure apparatus and a device manufacturing method based on such mirror holding system. The holding system includes a supporting member for supporting the optical element at a plurality of supports which are movable along an approximately radial direction about a predetermined point.

Abstract: A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: Disclosed is a mirror holding system by which aberration resulting from deformation or positional deviation of an optical member, causing degradation of imaging performance, can be reduced whereby a desired optical performance is assured. Also disclosed is an exposure apparatus and a device manufacturing method based on such mirror holding system. The holding system includes a supporting member for supporting the optical element at a plurality of supports which are movable along an approximately radial direction about a predetermined point.

Abstract: A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.

Abstract: A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through radiation in a non-contact manner.

Abstract: Disclosed is a mirror holding system by which aberration resulting from deformation or positional deviation of an optical member, causing degradation of imaging performance, can be reduced whereby a desired optical performance is assured. Also disclosed is an exposure apparatus and a device manufacturing method based on such mirror holding system. The holding system includes a supporting member for supporting the optical element at a plurality of supports which are movable along an approximately radial direction about a predetermined point.

Abstract: To provide an aligner capable of controlling a proper light exposure in accordance with an oxygen density and moisture density on an laser beam optical path, an aligner of the present invention is an aligner for illuminating a mask (or reticle) with the light emitted from a light source to expose an object to be exposed with the light reflected from the mask, which is provided with the following:

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: An image pickup apparatus in which an actuator varies an image forming position with respect to an image forming plane. The apparatus has a control mechanism for controlling the actuator. This control is such that the actuator performs a first operation for correcting an image shake and a second operation for moving the image formed on the image forming plane. In the latter operation, the image is moved by a predetermined amount relative to a pixel pitch of the image forming plane to change a resolving power.

Abstract: An image pickup apparatus includes an image pickup element for photoelectrically converting an optical image formed on an image pickup plane via an image pickup optical system and outputting a picked-up image signal, a variable optical system for shifting the optical image on the image pickup plane of the image pickup element, a control part for controlling the variable optical system and the image pickup element to pickup a predetermined field of view larger than the image pickup plane of the image pickup element by causing the image pickup element to pickup a plurality of optical images at a plurality of shifting positions of the variable optical system, respectively, an A/D converter for converting picked-up image signals outputted from the image pickup element into digital image signals, a memory for storing the digital image signals outputted from the A/D converter, and a signal processor for combining the digital image signals corresponding to the plurality of the optical images stored in the memory and

Abstract: The present invention relates to an optical instrument such as an optical axis deflecting device or an image stabilizing device having an optical member supported for rotation about a predetermined axis and rotated about the predetermined axis to thereby deflect the optical axis of passing light, moving means adapted to move in a direction along a plane inclined by a predetermined angle from a plane perpendicular to the predetermined axis to thereby rotate the optical member about the predetermined axis, and driving means for driving the moving means. With such construction, a driving force generated by the driving means acts on that portion of the optical member which is far from the rotational shaft thereof and as a result, a driving torque for driving the optical member can be enhanced without causing the bulkiness and higher cost of the device and an increase in consumed electric power.