Patents by Inventor Yoshiki KlMURA

Yoshiki KlMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER SYSTEM, AND METHOD FOR DETECTING ARRANGEMENT STATE OF SUBSTRATE
    Publication number: 20140350713
    Abstract: A substrate transfer robot includes a hand and a controller. The hand includes at least one detector configured to detect an arrangement state of a substrate in a substrate storage. The controller is configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage with the hand inclined in plan view toward a rotation center of the substrate transfer robot relative to a substrate storage center line. The substrate storage center line is in a direction perpendicular to a front surface of the substrate storage.
    Type: Application
    Filed: May 21, 2014
    Publication date: November 27, 2014
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: Yoshiki KlMURA