Abstract: [Problem to be solved] Provided is a method for processing a substrate having high etching selectivity of silicon with respect to silicon-germanium and further having a high selection ratio of silicon with respect to a silicon oxide film and/or a silicon nitride film in surface processing when manufacturing various types of silicon devices, particularly various types of silicon composite semiconductor devices containing silicon-germanium. [Solution] A method for processing a substrate includes: bringing an etching solution into contact with a substrate including a silicon film and a silicon-germanium film to perform etching; and selectively removing the silicon film, in which the etching solution contains an organic alkali and water and has a dissolved oxygen concentration of 0.20 ppm or less.

Abstract: A silicon etching solution including an aqueous alkaline solution containing a hypohalite ion in a range of 0.05 mmol/L or greater and 5 mmol/L or less and having a pH of 12.5 or greater at 24° C.

Abstract: In an electromagnetic relay, terminal slits into which a coil terminal connected to a coil, a fixed contact terminal to which a fixed contact is attached, and a movable contact terminal electrically connected to a movable contact are inserted into is formed in a base, and the base is formed with ventilation holes used to discharge gas generated in an internal space and discharge vapor generated in the internal space. The ventilation holes are formed so as to be connected with the terminal slits.

Abstract: In an electromagnetic relay, terminal slits into which a coil terminal connected to a coil, a fixed contact terminal to which a fixed contact is attached, and a movable contact terminal electrically connected to a movable contact are inserted into is formed in a base, and the base is formed with ventilation holes used to discharge gas generated in an internal space and discharge vapor generated in the internal space. The ventilation holes are formed so as to be connected with the terminal slits.

Abstract: An electrically operated mirror control device comprises a controller which includes a reverse linking unit for carrying out a reverse linking operation to tilt a mirror to change a mirror surface angle in linking with reversing of a vehicle, and a mirror switch which adjusts an amount of a change in the mirror surface angle of the mirror in the reverse linking operation. When the controller detects a predetermined operation in the reverse linking operation, a reverse angle memorizing control unit changes a first setting stored in a memorizing unit into a second setting of the mirror surface angle including the amount of the change in the mirror surface angle adjusted by the mirror switch at an end of the reverse linking operation.

Abstract: A control system of an open/close part for a vehicle includes an open/close part which can open or close, installed at an opening of a vehicle, a driving device supplying power for operating the open/close part, a load detection unit detecting a load of operation applied to the driving device, and a controller controlling the driving device through detecting a position of the open/close part, wherein, while the open/close part is being operated, the controller performs detection on a foreign object being trapped by determining whether the operation load applied to the driving device detected by the load detection unit is larger than a pre-determined threshold, and wherein, if the controller determines that a pre-determined condition based on a pre-determined manipulation is satisfied, the controller performs detection on a foreign object being trapped using a second threshold which is smaller than the pre-determined threshold.

Abstract: An electric mirror control device provided with a proportionality constant conversion means for converting the proportionality constant of a detection output voltage to the angle of a mirror surface to be positive or negative. When an up-down sensor and a right-left sensor for detecting the angle of the mirror surface have a plurality of specifications, each of which has a different proportionality constant of the detection output voltage to the angle of the mirror surface, controller determines the specification of the angle sensors based on whether the proportionality constant of the detection output voltage output via the proportionality constant conversion means is positive or negative, and controls an up-down motor or a right-left motor in accordance with the determined specification stored in advance.

Abstract: An outer sliding sunroof apparatus having a roof panel attached to an opening of a fixed roof of a vehicle, a drive device for opening and closing the roof panel, and a control unit for controlling the drive device. The apparatus further includes a load detector for detecting load applied to the drive device when the roof panel in a closed state is tilted up and moved toward a rear of the vehicle. When the load detector detects the load not less than a predetermined amount of load, the control unit is configured to move the roof panel in the closing direction.

Abstract: If a supply voltage for a motor drops below a predetermined level during movement of a windowpane, a controller of a power window system outputs a stop signal instructing the motor to stop rotating, and stores in a memory a first position and a motion direction of the windowpane derived from a first signal generated by a transducer (signal generator). The controller compares a second position of the windowpane derived from a second signal generated by the transducer when the supply voltage for the motor is restored to the predetermined level or higher with the first position of the windowpane stored in the memory. If the second position is different from the first position, the first position stored in the memory is corrected toward the motion direction by an amount corresponding to a difference between the first and second positions.

Abstract: The vehicular open and close panel system includes a drive means configured to supply power for sliding, and opening and closing a panel to open and close an opening of a vehicle body; a drive mechanism configured to operate the panel by power from the drive means; and a controller configured to control an operation of the panel, wherein the controller includes a pinch detection mode of making the panel perform a pinch elimination operation upon detecting a pinch in a close direction operation, and a complete close mode of prioritizing a close direction operation, depending on a complete close operation of a passenger, and wherein after performing the pinch detection operation by the pinch detection mode, the controller changes the close direction operation to the complete close mode until a predetermined condition is satisfied.

Abstract: An electric mirror control device provided with a proportionality constant conversion means for converting the proportionality constant of a detection output voltage to the angle of a mirror surface to be positive or negative. When an up-down sensor and a right-left sensor for detecting the angle of the mirror surface have a plurality of specifications, each of which has a different proportionality constant of the detection output voltage to the angle of the mirror surface, controller determines the specification of the angle sensors based on whether the proportionality constant of the detection output voltage output via the proportionality constant conversion means is positive or negative, and controls an up-down motor or a right-left motor in accordance with the determined specification stored in advance.

Abstract: An electrically operated mirror control device comprises a controller which includes a reverse linking unit for carrying out a reverse linking operation to tilt a mirror to change a mirror surface angle in linking with reversing of a vehicle, and a mirror switch which adjusts an amount of a change in the mirror surface angle of the mirror in the reverse linking operation. When the controller detects a predetermined operation in the reverse linking operation, a reverse angle memorizing control unit changes a first setting stored in a memorizing unit into a second setting of the mirror surface angle including the amount of the change in the mirror surface angle adjusted by the mirror switch at an end of the reverse linking operation.

Abstract: An outer sliding sunroof apparatus having a roof panel attached to an opening of a fixed roof of a vehicle, a drive device for opening and closing the roof panel, and a control unit for controlling the drive device includes a load detector for detecting load applied to the drive device when the roof panel in a closed state is tilted up and moved toward a rear of the vehicle, wherein when the load detector detects the load not less than a predetermined amount of load, the control unit is configured to move the roof panel in the closing direction.

Abstract: A system of controlling a sliding member for a vehicle includes a motor, a pulse generating device, a counting device and a control device. The system has a range for movement of the sliding member between a position short of a first lock position and a position short of a second lock position. Also, the system has an error range within the range for movement of the sliding member and memorizes in advance a range of pulse count representative of the error range. If a pulse count counted by the counting device falls within the range of pulse count when the sliding member discontinues movement due to detection of an overload of the motor, the system resets a pulse count counted by the counting device at one of the first and second lock positions.

Abstract: A control system of an open/close part for a vehicle includes an open/close part which can open or close, installed at an opening of a vehicle, a driving device supplying power for operating the open/close part, a load detection unit detecting a load of operation applied to the driving device, and a controller controlling the driving device through detecting a position of the open/close part, wherein, while the open/close part is being operated, the controller performs detection on a foreign object being trapped by determining whether the operation load applied to the driving device detected by the load detection unit is larger than a pre-determined threshold, and wherein, if the controller determines that a pre-determined condition based on a pre-determined manipulation is satisfied, the controller performs detection on a foreign object being trapped using a second threshold which is smaller than the pre-determined threshold.

Abstract: The vehicular open and close panel system includes a drive means configured to supply power for sliding, and opening and closing a panel to open and close an opening of a vehicle body; a drive mechanism configured to operate the panel by power from the drive means; and a controller configured to control an operation of the panel, wherein the controller includes a pinch detection mode of making the panel perform a pinch elimination operation upon detecting a pinch in a close direction operation, and a complete close mode of prioritizing a close direction operation, depending on a complete close operation of a passenger, and wherein after performing the pinch detection operation by the pinch detection mode, the controller changes the close direction operation to the complete close mode until a predetermined condition is satisfied.

Abstract: A master controller installed in a master controller box and slave controllers installed in car doors to open and close window glasses of a car are connected by a single wire to each of slave controllers for enabling to send control signals through such a single wire so that the master controller applies DOWN current signal, UP current signal and no flow of current to slave controllers.

Abstract: If a supply voltage for a motor drops below a predetermined level during movement of a windowpane, a controller of a power window system outputs a stop signal instructing the motor to stop rotating, and stores in a memory a first position and a motion direction of the windowpane derived from a first signal generated by a transducer (signal generator). The controller compares a second position of the windowpane derived from a second signal generated by the transducer when the supply voltage for the motor is restored to the predetermined level or higher with the first position of the windowpane stored in the memory.

Abstract: A power window system includes: an open/close switch that is provided to each of a plurality of vehicle seats for issuing an open/close instruction to the corresponding seat windows; a control device for controlling the open/close operation of the seat windows based on the operation of the open/close switch, and is configured by as many control sections as the vehicle seats with a one-to-one relationship therebetween, i.e., a master controller and a plurality of sub controllers; and a communications unit for carrying out communications between the control section at a driver seat and the control sections at the remaining seats. The sub controllers at the seats other than the driver seat are each provided with an operation command section, operating when normal communications is not available with the master controller at the driver seat, even if a close signal is issued from the open/close switches.

Abstract: A system of controlling a sliding member for a vehicle includes a motor, a pulse generating device, a counting device and a control device. The system has a range for movement of the sliding member between a position short of a first lock position and a position short of a second lock position. Also, the system has an error range within the range for movement of the sliding member and memorizes in advance a range of pulse count representative of the error range. If a pulse count counted by the counting device falls within the range of pulse count when the sliding member discontinues movement due to detection of an overload of the motor, the system resets a pulse count counted by the counting device at one of the first and second lock positions.