Abstract: An object of the present invention is to provide a colored photosensitive composition capable of forming a color filter array having improved spectral characteristics. The colored photosensitive composition comprises a compound represented by the formula (I) or a salt thereof: wherein in the formula (I), Z1 and Z2 represent an oxygen or sulfur atom; R1 to R4 represents a hydrogen atom, a saturated aliphatic hydrocarbon group (which may be substituted with a hydroxyl group), an aryl group, an aralkyl group, or an acyl group; and R5 to R12 represents a hydrogen atom, a halogen atom, a (halogenated) saturated aliphatic hydrocarbon group, an alkoxyl group, a carboxyl group, a sulfo group, or an (N-substituted) sulfamoyl group, and at least one of R5 to R12 is an N-substituted sulfamoyl group.

Abstract: An object of the present invention is to provide a colored photosensitive composition capable of forming a color filter array having improved spectral characteristics. The colored photosensitive composition comprises a compound represented by the formula (I) or a salt thereof: wherein in the formula (I), R1 to R4 represents a hydrogen atom, a C1-10 saturated aliphatic hydrocarbon group, or a carboxyl group; R5 to R12 represents a hydrogen atom, a halogen atom, a (halogenated) C1-10 saturated aliphatic hydrocarbon group, a C1-8 alkoxyl group, a carboxyl group, a sulfo group, or an (N-substituted) sulfamoyl group; at least one of R5 to R12 is an N-substituted sulfamoyl group; and R13 and R14 represent a hydrogen atom, a cyano group, or an (N-substituted) carbamoyl group.

Abstract: A colored photosensitive resin composition comprises a compound represented by the formula (I) or a salt thereof: wherein R10, R11, R13 and R14 represent independently of each other a hydrogen atom or an alkyl group; R12 represents a sulfonic acid group, a carboxylic acid group, an ester thereof, or an amide represented by the formula (1) —SO2NHR15 , and ??(1) X? represents BF4?, PF6?, Y? or YO4? (in which Y represents a halogen atom), or a dye having a sulfonic acid group.

Abstract: A colored photosensitive resin composition comprising an alkali-soluble resin, a photosensitive compound, a curing agent, a solvent and a colorant represented by the formula (I): The colored photosensitive resin composition can form a color filter array which shows good spectral characteristics.

Abstract: The present invention provides a colored photosensitive resin composition which causes a small change in exposure when a pattern is subjected to projection exposure. Disclosed is a colored photosensitive resin composition comprising a dye, a photo acid generator, a curing agent, an alkali-soluble resin, a solvent, and a compound represented by the formula (I): in the formula (I), R1 to R3 each independently represents a hydrogen atom, a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 12 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an aryl group having 6 to 12 carbon atoms, and a hydrogen atom on the linear alkyl group having 1 to 6 carbon atoms, a hydrogen atom on the branched alkyl group having 3 to 12 carbon atoms, a hydrogen atom on the cycloalkyl group and a hydrogen atom on the aryl group may be substituted with a hydroxyl group, provided that at least one of R1 to R3 represents a group other than a hydrogen atom.

Abstract: The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator, and multifunctional epoxy compound, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

Abstract: The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

Abstract: A chemical amplifying type positive resist composition, excellent in balance of performance of resolution and sensitivity, having high dry etching resistance and comprising; a resin having a polymerization unit derived from a monomer represented by the following formula (I): wherein R1 and R2 independently represent hydrogen or an alkyl group having 1 to 4 carbons, and R3 represents hydrogen or a methyl group, the resin being insoluble in alkali itself but becoming alkali-soluble due to the action of an acid; and an acid generating agent is provided.

Abstract: The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator, and multifunctional epoxy compound, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

Abstract: A resist composition comprising a binder resin and a radiation-sensitive compound. The binder resin is an alkali-soluble resin or becomes alkali-soluble resin by the action of the radiation-sensitive compound after irradiation, and has a polymerization unit represented by the following formula (I): wherein, R1 represents a fluoroalkyl group having 1 to 12 carbon atoms and having at least one fluorine atom, and R2 represents hydrogen atom or an acyl group having 2 to 5 carbon atoms.

Abstract: The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

Abstract: The present invention provides a chemical amplification type positive resist composition comprising a resin having structural units of the following general formulae (I) and (II) and insoluble or poorly soluble itself in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid; an acid generating agent; and a multifunctional epoxy compound: 1

Abstract: A chemical amplification type positive resist composition excellent in balance of properties such as resolution, profile, sensitivity, dry etching resistance, adhesion and the like which comprises a resin which has the following polymeric units (A), (B) and (C); and an acid generating agent.

Abstract: A chemical amplification type positive resist composition showing a high transmittance at a wavelength of 157 nm and manifesting excellent balance of abilities is provided which comprises a resin having polymerization units of the general formulae (I) and (II) and insoluble or poorly soluble itself in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid; and an acid generating agent: 1

Abstract: A chemical amplifying type positive resist composition, excellent in balance of performance of resolution and sensitivity, having high dry etching resistance and comprising;

Abstract: A positive resist composition comprising a binder resin and a radiation-sensitive compound, wherein the binder resin contains a polymerization unit of the following formula (I) and a polymerization unit of the following formula (II) and becomes alkali-soluble by the radiation-sensitive compound after irradiation with radioactive ray: 1

Abstract: A resist composition comprising a binder resin and a radiation-sensitive compound.

Abstract: A chemical amplification type positive resist composition excellent in balance of properties such as resolution, profile, sensitivity, dry etching resistance, adhesion and the like which comprises a resin which has the following polymeric units (A), (B) and (C); and an acid generating agent.