Patents by Inventor Yoshiko Nakai

Yoshiko Nakai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polyparaxylylene film, production method therefor and semiconductor device
    Patent number: 6946405
    Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as an insulating layer of a semiconductor devices is provided, as well as a manufacturing method for the film and a semiconductor device incorporating the film.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: September 20, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Akio Takahashi, Yuichi Satsu, Yoshiko Nakai, Igor Yefimovich Kardash, Andrei Vladimirovich Pebalk, Sergei Nicolaevich Chvalun, Karen Andranikovich Mailyan, Harukazu Nakai
  • Organic polymer film, method for producing the same and semiconductor device using the same
    Publication number: 20050156287
    Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as insulating layers of semiconductor devices, a method of manufacturing the organic polymer film, and a semiconductor device using the organic polymer film.
    Type: Application
    Filed: July 22, 2002
    Publication date: July 21, 2005
    Inventors: Akio Takahashi, Yuichi Satsu, Harukazu Nakai, Yoshiko Nakai, Igor Kardash, Andrei Pebalk, Sergei Chvalun, Kearen Mailyan
  • Polyparaxylylene film, production method therefor and semiconductor device
    Publication number: 20050014388
    Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as an insulating layer of a semiconductor devices is provided, as well as a manufacturing method for the film and a semiconductor device incorporating the film.
    Type: Application
    Filed: July 22, 2002
    Publication date: January 20, 2005
    Inventors: Akio Takahashi, Yuichi Satsu, Harakazu Nakai, Yoshiko Nakai, Igor Kardash, Andrei Pebalk, Sergei Chvalun, Karen Mailyan