Patents by Inventor Yoshikuni Yoneyama

Yoshikuni Yoneyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination device, exposure apparatus, adjusting method, and method for manufacturing object
    Patent number: 9632423
    Abstract: An illumination device includes a plurality of light source units, each including a light source, a mirror that reflects light from the light source, and one or more light blocking members that block the light that is reflected by the mirror and travels toward the illumination surface; and an illumination optical system that forms a light intensity distribution of superposed light, in which the light from each of the light source units is superposed, in a pupil plane and illuminates the illumination surface with the superposed light. In the light intensity distribution in the pupil plane of the illumination optical system, positions of shadows of all of the light blocking members included in one of the light source units are separated from positions of shadows of all of the light blocking members included in at least one of the remaining light source units.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: April 25, 2017
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yoshikuni Yoneyama, Kentaro Hiruma, Noboru Osaka
  • ILLUMINATION DEVICE, EXPOSURE APPARATUS, ADJUSTING METHOD, AND METHOD FOR MANUFACTURING OBJECT
    Publication number: 20150362843
    Abstract: An illumination device includes a plurality of light source units, each including a light source, a mirror that reflects light from the light source, and one or more light blocking members that block the light that is reflected by the mirror and travels toward the illumination surface; and an illumination optical system that forms a light intensity distribution of superposed light, in which the light from each of the light source units is superposed, in a pupil plane and illuminates the illumination surface with the superposed light. In the light intensity distribution in the pupil plane of the illumination optical system, positions of shadows of all of the light blocking members included in one of the light source units are separated from positions of shadows of all of the light blocking members included in at least one of the remaining light source units.
    Type: Application
    Filed: June 15, 2015
    Publication date: December 17, 2015
    Inventors: Yoshikuni Yoneyama, Kentaro Hiruma, Noboru Osaka