Abstract: The present invention provides an exposure apparatus including a projection device including an object whose at least one of a position, an attitude and a shape is regulatable, and configured to project light from a reticle onto a substrate, a regulating device configured to regulate the at least one of the position, the attitude and the shape of the object, and a controller configured to obtain, an amount of regulation of the object by the regulating device, the amount of regulation being used for regulating a first optical characteristic value of the projection device expressed by a square root of a weighted square sum of wavefront aberration coefficients of light projected by the projection device, and to control the regulating device based on the amount of regulation.

Abstract: The present invention provides an exposure apparatus including a projection device including an object whose at least one of a position, an attitude and a shape is regulatable, and configured to project light from a reticle onto a substrate, a regulating device configured to regulate the at least one of the position, the attitude and the shape of the object, and a controller configured to obtain, an amount of regulation of the object by the regulating device, the amount of regulation being used for regulating a first optical characteristic value of the projection device expressed by a square root of a weighted square sum of wavefront aberration coefficients of light projected by the projection device, and to control the regulating device based on the amount of regulation.

Abstract: A small-sized electric motor includes a yoke formed by bending a rectangular metallic plate into an oval shaped tube having a pair of flat parts and a pair of arcuate parts and joining opposite ends of the metallic plate. An end cap is secured on one end of the yoke and a gear casing is secured to the yoke by a tab formed on another end of the yoke. The joining faces of the metallic plate are located away from the center line of an arcuate part of the yoke and jagged faces are formed on the joining faces. The jagged faces are composed only of curved parts and straight parts having inclinations to the axis of the yoke. The end cap is secured by crimping a bendable tab formed on one end of the yoke by burring. A tab for securing the yoke to a gear box is formed by bending a tongue provided on the metallic plate together with notches on both sides of the tongue.