Abstract: The information record apparatus (1) is provided with: a record device (310) for recording the information onto an information record medium (100) by using laser light having controllable record power; a calibration device (340) for obtaining a calibration value of the record power by recording calibration data to obtain the calibration value into a calibration area (103) arranged in the information record medium to obtain the calibration value; and a first erase device (320) for erasing a part of the calibration data recorded into the calibration area.

Abstract: A CVD apparatus having a single loading-unloading chamber that serves as a loading chamber in the left and center parts and as an unloading chamber in the right and center parts. Alternately, wafers provisionally stored in cassettes are put into and taken from an auxiliary chamber connected at the center part. The loading-unloading chamber has a sliding bed for slidingly transferring two cassettes, each used for temporarily carrying a plurality of wafers for loading from a load cassette table through the loading cassette to a reaction chamber and for unloading from the reaction chamber through an unloading cassette to an unloading cassette table.

Abstract: In a CVD reaction apparatus having a heated reaction chamber (102) and a buffer chamber (103) connected continuously under the reaction chamber and a wafer boat elevator (114) which is to be raised to put the wafer boat (113) in the reaction chamber and brought down to the buffer chamber (103), a vertically moving shutter (122) is provided which gas-tightly isolates the buffer chamber (103) from the reaction chamber (102) during the CVD reaction process and an evacuation tube (123') having an evacuation valve (123) and an inert gas inlet tube (125') are connected to the buffer chamber (103), for maintaining the pressure of the buffer chamber higher than that of the reaction chamber.