Patents by Inventor Yoshinobu Hoshino
Yoshinobu Hoshino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230420214Abstract: An input and output device includes: an instruction analysis unit configured to generate a conversation document in which a conversation uttered by a user is converted into character string data and recognize, based on the conversation document, a conversation intention of the user including an instruction to an image acquisition device; a history retention unit configured to record, as history information, the conversation document, the conversation intention, and a response of the image acquisition device to the instruction to the image acquisition device; a difference analysis unit configured to divide a report creation period using a timing when the user issues, to the image acquisition device, an instruction including an intention to save a captured image as a boundary and output report creation information in which history information divided for each of the report creation periods, and a captured image and a differential condition corresponding to the history information are associated with each other;Type: ApplicationFiled: November 16, 2020Publication date: December 28, 2023Inventors: Ryo KOMATSUZAKI, Shuntaro ITO, Hiroyuki CHIBA, Takashi SHIDARA, Yoshinobu HOSHINO, Hirofumi SATO
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Patent number: 11538657Abstract: An alignment system that realizes high reproducibility of position information during re-observation and in which a user can efficiently and easily re-observe an area of interest is provided.Type: GrantFiled: October 18, 2019Date of Patent: December 27, 2022Assignees: Hitachi High-Tech Corporation, RIKENInventors: Yaku Maeda, Yoshinobu Hoshino, Kiminori Toyooka
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Patent number: 11508047Abstract: Even if a generated wide-field image includes residual local misalignment, this charged particle microscope device can prompt for user input to correct such local misalignment, and can regenerate, on the basis of the user input, a wide-field image that includes little misalignment even in local areas of the overlap regions thereof.Type: GrantFiled: September 14, 2017Date of Patent: November 22, 2022Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Mitsutoshi Kobayashi, Maki Tanaka, Yoshinobu Hoshino
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Publication number: 20220351935Abstract: Provided is a method for adjusting a field-of-view of a charged particle microscope device, in which reference data for a sample is set, a plurality of regions of interest are set for the reference data, a rough sampling coordinate group is set for each of the plurality of regions of interest, the sample is irradiated with charged particles based on the sampling coordinate group to obtain a corresponding pixel value group, a plurality of reconstructed images corresponding to the plurality of regions of interest are generated based on the pixel value group, a correspondence relationship among the plurality of regions of interest is estimated based on the plurality of reconstructed images, and the plurality of regions of interest are adjusted based on the correspondence relationship. Here, the sampling coordinate group is set based on the reference data.Type: ApplicationFiled: September 20, 2019Publication date: November 3, 2022Applicant: Hitachi High-Tech CorporationInventors: Mitsutoshi KOBAYASHI, Atsushi MIYAMOTO, Yoshinobu HOSHINO
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Patent number: 11385193Abstract: An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.Type: GrantFiled: May 10, 2018Date of Patent: July 12, 2022Assignee: Hitachi High-Tech CorporationInventors: Hiroyuki Chiba, Miku Maehara, Yoshinobu Hoshino, Shigeru Kawamata
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Patent number: 11239050Abstract: An object of the invention is to easily acquire an image of a position corresponding between each section in an imaging device that acquires an image of a plurality of sample sections. The imaging device according to the invention calculates, according to a correspondence relationship between a characteristic point and a first observation region in a first sample section, coordinates of a second observation region of a second sample section, and generates an observation image at the calculated coordinates (see FIG. 7B).Type: GrantFiled: October 16, 2017Date of Patent: February 1, 2022Assignee: Hitachi High-Tech CorporationInventors: Miku Maehara, Shigeru Kawamata, Yoshinobu Hoshino, Hiroyuki Chiba
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Publication number: 20210407761Abstract: An alignment system that realizes high reproducibility of position information during re-observation and in which a user can efficiently and easily re-observe an area of interest is provided.Type: ApplicationFiled: October 18, 2019Publication date: December 30, 2021Inventors: Yaku MAEDA, Yoshinobu HOSHINO, Kiminori TOYOOKA
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Publication number: 20210247335Abstract: An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.Type: ApplicationFiled: May 10, 2018Publication date: August 12, 2021Inventors: Hiroyuki CHIBA, Miku MAEHARA, Yoshinobu HOSHINO, Shigeru KAWAMATA
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Publication number: 20210193432Abstract: An object of the invention is to easily acquire an image of a position corresponding between each section in an imaging device that acquires an image of a plurality of sample sections. The imaging device according to the invention calculates, according to a correspondence relationship between a characteristic point and a first observation region in a first sample section, coordinates of a second observation region of a second sample section, and generates an observation image at the calculated coordinates (see FIG. 7B).Type: ApplicationFiled: October 16, 2017Publication date: June 24, 2021Inventors: Miku MAEHARA, Shigeru KAWAMATA, Yoshinobu HOSHINO, Hiroyuki CHIBA
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Patent number: 10763074Abstract: A charged particle beam apparatus includes: an optical system that irradiates a sample mounted on a sample stage with a charged particle beam; at least one detector that detects a signal generated from the sample; an imaging device that acquires an observation image; a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes the charged particle beam's irradiation position; a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image; and a controller that controls display processing of the operation screen. The controller superimposes and displays on the observation position displaying portion a plurality of observation position images at different magnifications, based on the observation images' magnifications and coordinates.Type: GrantFiled: September 19, 2019Date of Patent: September 1, 2020Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Hiroyuki Chiba, Yoshinobu Hoshino, Shigeru Kawamata
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Patent number: 10763078Abstract: There is provided a charged particle beam device which includes a charged particle beam source, a charged particle beam optical system that irradiates a sample with a charged particle beam from the charged particle beam source, a detector that detects a secondary signal generated from the sample by irradiation with the charged particle beam, and an image processing unit that executes integration processing of image data obtained from the secondary signal and outputting an integrated image, and in which the image processing unit executes a normalization integration computation of outputting an integrated image in which a luminance value of the integrated image is always “1” in an integration process.Type: GrantFiled: November 4, 2019Date of Patent: September 1, 2020Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Masato Kamio, Masashi Watanabe, Katsunori Hirano, Yoshinobu Hoshino, Shigeru Kawamata, Yuichi Sakurai
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Publication number: 20200265568Abstract: Even if a generated wide-field image includes residual local misalignment, this charged particle microscope device can prompt for user input to correct such local misalignment, and can regenerate, on the basis of the user input, a wide-field image that includes little misalignment even in local areas of the overlap regions thereof.Type: ApplicationFiled: September 14, 2017Publication date: August 20, 2020Inventors: Mitsutoshi KOBAYASHI, Maki TANAKA, Yoshinobu HOSHINO
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Publication number: 20200066484Abstract: There is provided a charged particle beam device which includes a charged particle beam source, a charged particle beam optical system that irradiates a sample with a charged particle beam from the charged particle beam source, a detector that detects a secondary signal generated from the sample by irradiation with the charged particle beam, and an image processing unit that executes integration processing of image data obtained from the secondary signal and outputting an integrated image, and in which the image processing unit executes a normalization integration computation of outputting an integrated image in which a luminance value of the integrated image is always “1” in an integration process.Type: ApplicationFiled: November 4, 2019Publication date: February 27, 2020Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Masato KAMIO, Masashi WATANABE, Katsunori HIRANO, Yoshinobu HOSHINO, Shigeru KAWAMATA, Yuichi SAKURAI
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Publication number: 20200013583Abstract: A charged particle beam apparatus includes: an optical system that irradiates a sample mounted on a sample stage with a charged particle beam; at least one detector that detects a signal generated from the sample; an imaging device that acquires an observation image; a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes the charged particle beam's irradiation position; a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image; and a controller that controls display processing of the operation screen. The controller superimposes and displays on the observation position displaying portion a plurality of observation position images at different magnifications, based on the observation images' magnifications and coordinates.Type: ApplicationFiled: September 19, 2019Publication date: January 9, 2020Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki CHIBA, Yoshinobu HOSHINO, Shigeru KAWAMATA
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Patent number: 10522325Abstract: There is provided a charged particle beam device which includes a charged particle beam source, a charged particle beam optical system that irradiates a sample with a charged particle beam from the charged particle beam source, a detector that detects a secondary signal generated from the sample by irradiation with the charged particle beam, and an image processing unit that executes integration processing of image data obtained from the secondary signal and outputting an integrated image, and in which the image processing unit executes a normalization integration computation of outputting an integrated image in which a luminance value of the integrated image is always “1” in an integration process.Type: GrantFiled: November 27, 2015Date of Patent: December 31, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Masato Kamio, Masashi Watanabe, Katsunori Hirano, Yoshinobu Hoshino, Shigeru Kawamata, Yuichi Sakurai
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Patent number: 10453650Abstract: A charged particle beam apparatus includes: an optical system that irradiates a sample mounted on a sample stage with a charged particle beam; at least one detector that detects a signal generated from the sample; an imaging device that acquires an observation image; a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes the charged particle beam's irradiation position; a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image; and a controller that controls display processing of the operation screen. The controller superimposes and displays on the observation position displaying portion a plurality of observation position images at different magnifications, based on the observation images' magnifications and coordinates.Type: GrantFiled: November 25, 2015Date of Patent: October 22, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki Chiba, Yoshinobu Hoshino, Shigeru Kawamata
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Patent number: 10431417Abstract: In order to provide a sample holder capable of easily searching for an observation field of view, the sample holder includes a sample placement portion including a first top surface on which a counterbore part is formed and a rotational axis for rotating the first top surface horizontally, the counterbore part being aligned by being mounted with a sample supporting member having a pattern for alignment, a sample base portion including an opening through which the sample placement portion is capable of moving vertically and a second top surface around the opening, and a sample cover portion which has conductivity and is pressed down toward a direction of the second top surface of the sample base portion, so that a top surface of the sample supporting member placed on the sample placement portion and the second top surface of the sample base portion are flush with each other.Type: GrantFiled: April 13, 2016Date of Patent: October 1, 2019Assignee: Hitachi High-Technologies CorporationInventors: Akira Ikeuchi, Shigeru Haneda, Yoshinobu Hoshino
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Publication number: 20190122853Abstract: In order to provide a sample holder capable of easily searching for an observation field of view, the sample holder includes a sample placement portion including a first top surface on which a counterbore part is formed and a rotational axis for rotating the first top surface horizontally, the counterbore part being aligned by being mounted with a sample supporting member having a pattern for alignment, a sample base portion including an opening through which the sample placement portion is capable of moving vertically and a second top surface around the opening, and a sample cover portion which has conductivity and is pressed down toward a direction of the second top surface of the sample base portion, so that a top surface of the sample supporting member placed on the sample placement portion and the second top surface of the sample base portion are flush with each other.Type: ApplicationFiled: April 13, 2016Publication date: April 25, 2019Inventors: Akira IKEUCHI, Shigeru HANEDA, Yoshinobu HOSHINO
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Publication number: 20180323035Abstract: A charged particle beam apparatus includes: an optical system that irradiates a sample mounted on a sample stage with a charged particle beam; at least one detector that detects a signal generated from the sample; an imaging device that acquires an observation image; a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes the charged particle beam's irradiation position; a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image; and a controller that controls display processing of the operation screen. The controller superimposes and displays on the observation position displaying portion a plurality of observation position images at different magnifications, based on the observation images' magnifications and coordinates.Type: ApplicationFiled: November 25, 2015Publication date: November 8, 2018Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki CHIBA, Yoshinobu HOSHINO, Shigeru KAWAMATA
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Publication number: 20180301316Abstract: There is provided a charged particle beam device which includes a charged particle beam source, a charged particle beam optical system that irradiates a sample with a charged particle beam from the charged particle beam source, a detector that detects a secondary signal generated from the sample by irradiation with the charged particle beam, and an image processing unit that executes integration processing of image data obtained from the secondary signal and outputting an integrated image, and in which the image processing unit executes a normalization integration computation of outputting an integrated image in which a luminance value of the integrated image is always “1” in an integration process.Type: ApplicationFiled: November 27, 2015Publication date: October 18, 2018Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Masato KAMIO, Masashi WATANABE, Katsunori HIRANO, Yoshinobu HOSHINO, Shigeru KAWAMATA, Yuichi SAKURAI