Abstract: A double-head grinding machine includes a disc-shaped carrier ring having a support hole for supporting a silicon wafer, a rotation mechanism rotating the carrier ring around a center of the carrier ring, and a grinding wheel including a grinding stone for grinding the silicon wafer. The support hole is circular and has a center eccentric to the center of the carrier ring.

Abstract: A double-head grinding machine includes: a spindle driving portion configured to rotate a spindle to which a grinding wheel is attachable; a moving portion configured to move the spindle driving portions toward and away from a wafer; and an inclination measuring portion configured to measure a change in an inclination of the spindle in association with a movement of the spindle driving portions.

Abstract: A double-head grinding machine includes a disc-shaped carrier ring having a support hole for supporting a silicon wafer, a rotation mechanism rotating the carrier ring around a center of the carrier ring, and a grinding wheel including a grinding stone for grinding the silicon wafer. The support hole is circular and has a center eccentric to the center of the carrier ring.

Abstract: A diffusion plate includes a plate member facing an opening end of a supply pipe with a thickness direction thereof substantially parallel with a supply direction of a supply fluid. The plate member is rotatable around a rotation axis substantially parallel with the thickness direction and has a diffusion hole, penetrating in the thickness direction at a position other than a rotation center of the plate member. The diffusion hole has a wall surface defined at a rear side in a rotation direction and has a first wall surface end defined in a facing surface facing the supply pipe, at a rearmost in the rotation direction and a second wall surface end defined in a non-facing surface at a rearmost in the rotation direction. The wall surface is inclined with the first wall surface end being at a front side of the second wall surface end in the rotation direction.

Abstract: A double-head grinding machine includes: a spindle driving portion configured to rotate a spindle to which a grinding wheel is attachable; a moving portion configured to move the spindle driving portions toward and away from a wafer; and an inclination measuring portion configured to measure a change in an inclination of the spindle in association with a movement of the spindle driving portions.

Abstract: A diffusion plate includes a plate member facing an opening end of a supply pipe with a thickness direction thereof substantially parallel with a supply direction a supply fluid. The plate member is rotatable around a rotation axis substantially parallel with the thickness direction and has a diffusion hole, penetrating in the thickness direction at a position other than a rotation center of the plate member. The diffusion hole has a wall surface defined at a rear side in a rotation direction and has a first wall surface end defined in a facing surface facing the supply pipe, at a rearmost in the rotation direction and a second wall surface end defined in a non-facing surface at a rearmost in the rotation direction. The wall surface is inclined with the first wall surface end being at a front side of the second wall surface end in the rotation direction.

Abstract: A reforming apparatus for reforming a raw fuel into a hydrogen-rich reformed gas includes a reformer for generating the reformed gas from the raw fuel, and a steam supply means for supplying the steam to the reformer. The steam supply means has a dry-out heat exchanger that dries out the water by conducting heat exchange with the reformed gas generated when the raw fuel is combusted. The cross-sectional area of passage in the dry-out heat exchanger is larger than that of a pipe connected upstream of the dry-out heat exchanger.

Abstract: This fuel cell system [[1]] provides a fuel cell system that can be reduced in cost. This fuel cell system [[1]] includes a reformer [[11]] for reforming raw fuel using a burner [[15]] to generate reformed gas, and a CO shift converter [[12]] shaped like a tube provided integrally with the reformer [[11]] such that the reformer [[11]] is positioned in the tube, for reducing a carbon monoxide concentration in the reformed gas generated by the reformer [[11]]. In the fuel cell system [[1]], the CO shift converter [[12]] can be heated with exhaust gas from the burner [[15]] to increase the temperature thereof. Therefore, the need for a heater to increase the temperature of the CO shift converter [[12]] can be eliminated.

Abstract: A reforming apparatus for reforming a raw fuel into a hydrogen-rich reformed gas includes a reformer for generating the reformed gas from the raw fuel, and a steam supply means for supplying the steam to the reformer. The steam supply means has a dry-out heat exchanger that dries out the water by conducting heat exchange with the reformed gas generated when the raw fuel is combusted. The cross-sectional area of passage in the dry-out heat exchanger is larger than that of a pipe connected upstream of the dry-out heat exchanger.

Abstract: A sealing material for air-conditioners is made from a polyurethane foam produced from material components containing a polyol, an isocyanate, from 1 to 25 parts by weight of an antiozonant per 100 parts by weight of the polyol, a catalyst, and an antioxidant, wherein the antioxidant, an antioxidant used in synthesizing the polyol, and the antiozonant each have a molecular weight not lower than a certain level.

Abstract: A polyurethane foam is produced by mixing a polyol, an isocyanate, a catalyst, and an antioxidant, wherein the antioxidant and an antioxidant used in synthesizing the polyol each are a high-molecular compound having a number-average molecular weight not lower than a certain level, and the amount of volatile organic compounds emitted from the polyurethane foam is thus reduced.

Abstract: Disclosed herein is a load cell provided with a high-precision load-sensing member of ceramic on which are formed patterns of thin-film resistance for strain gages which are not subject to breakage and variation of resistance. The load cell comprises a bending beam of ceramic material and strain gages of thin-film resistance formed thereon, with the bending beam having a surface coated with amorphous glass on which are formed said strain gages of thin-film resistance. The strain gages are formed from an alloy composed of iron and one or more selected from chromium, cobalt, tungsten, molybdenum, niobium, and tantalum, and a small amount of impurities.