Abstract: Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.

Abstract: Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.

Abstract: An exhaust pump includes: a cylindrical rotating member; an outer cylindrical fixed member; an inner cylindrical fixed member a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.

Abstract: Provided are a vacuum pump and a method for the vacuum pump in which, when contact between a rotating body and a stator is sensed, the cause of the contact can be analyzed. Contact determination is made using a threshold for rotating body contact determination for a displacement signal and a threshold for rotating body contact determination for an acceleration signal. The amount of unbalance of a rotating body is determined using a threshold for amount-of-unbalance increase determination for the displacement signal and a threshold for amount-of-unbalance increase determination for the acceleration signal. When, in one of the displacement signal and the acceleration signal, the threshold for amount-of-unbalance increase determination or the threshold for amount-of-unbalance increase determination is exceeded within a predetermined time before determination of an estimated time point of contact, the contact is determined not to be caused by an increase in accumulation of products.

Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.

Abstract: A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.

Abstract: The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer.

Abstract: A vacuum pump includes a casing having an inlet port and an outlet port, a stator portion provided inside the casing and a rotor portion having a shaft rotatably supported inside the casing and a rotor disposed on the shaft and provided with a gas transfer mechanism that transfers a gas from the inlet port to the outlet port. The rotor portion is arranged with a predetermined clearance between the rotor portion and the stator portion. A motor rotates the shaft. Vibration detection disposed in the stator portion detects vibrations by converting vibration amplitude to an electric signal. Contact detection judges an occurrence of contact between the stator portion and the rotor portion when, in the vibration detected by the vibration detection, an amplitude in frequency of a specific vibration caused by contact between the stator portion and the rotor portion exceeds a predetermined threshold value.

Abstract: Provided is an exhaust pump that is suitable for enhancing durability, processability of connecting opening portions in a pump production stage, and evacuation performance.

Abstract: A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.

Abstract: To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.

Abstract: To provide a vacuum pump in which possibilities of decreased exhaust performance and gas leakage at the time of breakage of a rotor are lessened, in the case where a rotating part closes the inside opening portion of an exhaust outlet portion to decrease the height dimension of the vacuum pump, and further a connector lead wire is installed, easily. An inside opening edge portion of a gas discharge passage for combining the downstream space of the rotor with the exhaust outlet portion is caused to take a shape such that the opening edge portion has no blind portion when a gas exhaust passage forming member is viewed from at least either of an upper side or an oblique upper side, or from at least either of an lower side or an oblique lower side. Furthermore, the inner corner portion of this opening edge portion is formed into a rounded shape to reduce stress concentration.

Abstract: Provided is a vacuum pump which can detect precisely physical contact between a rotor portion and a stator portion, and contact between the rotor portion and the stator portion that occurs as the amount of deposited solid product reaches the clearance between the rotor portion and the stator portion. A vibration sensor is provided, taking advantage of a clearance, at the outer peripheral of a thread groove spacer. Contact between the rotor portion and the stator portion is decided, when a particular vibration during contact between the rotor portion and the stator portion exceeds a predetermined threshold value. The vibration sensor is mounted on the outer peripheral of the thread groove spacer at the end of the side of an exhaust port. The thread groove spacer is fixed on a casing via an elastic member (an O-ring) that have a vibration absorption (vibration damping) function of a cutoff frequency (fc1).

Abstract: To form a shock absorbing structure more easily. A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation.

Abstract: Vibrations generated by a vacuum pump are prevented from propagating to external equipment such as an electron microscope. A casing (a separate casing portion and a casing main body) that houses a stator, stator blades, a rotor portion, and rotor blades as an exhaust function portion is connected to an inlet port portion in which an inlet port for sucking in a gas from the outside is formed, through an elastic member. An suction space between the casing and the inlet port portion is sealed by a bellows cylinder sealing means, and motion regulating members and motion regulating members and which regulate the amount of separation between the inlet port portion and the casing, and change shape due to relative motion between the two, are formed between the inlet port portion and the casing.

Abstract: A correction value of electromagnetic current supplied to each electromagnet, such that torque generated by a motor is constant, is determined for each predetermined angle while a rotor is rotated, by which an electromagnetic current of each phase is corrected. The correction value can be calculated by a predetermined formula using an induced voltage etc. of motor. Also, the configuration may be such that at the time when the motor is driven, the correction value is calculated for each predetermined angle and is stored in a RAM, and during the operation of the motor, the correction value is read from the RAM to correct the electromagnet current.

Abstract: Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector, a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor by the reciprocal of the mass of the rotor. The result of this calculation is reversed in polarity and is added to the output of a compensator by an adder.

Abstract: Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector, a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor by the reciprocal of the mass of the rotor. The result of this calculation is reversed in polarity and is added to the output of a compensator by an adder.

Abstract: There is provided a vacuum pump which suppresses the propagation of vibrations to an external container without the use of a damper. The vacuum pump has an outer cylindrical portion, a rotor portion and a stator portion accommodated within the outer cylindrical portion to define a transferring portion for a gas sucked from an inlet port, a magnetic bearing for supporting the rotor portion with respect to the stator portion, a motor for rotating the rotor portion with respect to the stator portion, and a base for supporting the outer cylindrical portion and the stator portion. A vibration absorbing member is interposed between the stator portion and the base, which has a natural frequency F=(f1+f3)/2±(f1−f3)/4, provided that f1, f2 and f3 respectively denote a natural frequency of nutation in conical mode, a natural frequency in parallel mode and a natural frequency of procession in the conical mode, when the rotor portion is rotated at a rated speed.

Abstract: Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector, a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor by the reciprocal of the mass of the rotor. The result of this calculation is reversed in polarity and is added to the output of a compensator by an adder.