Patents by Inventor Yoshinori Akahane

Yoshinori Akahane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
    Patent number: 10971331
    Abstract: In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.
    Type: Grant
    Filed: June 21, 2019
    Date of Patent: April 6, 2021
    Assignee: NuFlare Technology, Inc.
    Inventors: Shinji Sakamoto, Kenichi Yasui, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane
  • WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM ON WHICH PROGRAM IS RECORDED, AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS
    Publication number: 20200051782
    Abstract: In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.
    Type: Application
    Filed: June 21, 2019
    Publication date: February 13, 2020
    Applicant: NuFlare Technology, Inc.
    Inventors: Shinji SAKAMOTO, Kenichi Yasui, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane